Substrate Nozzle Piping with Protective Pipe for Leak Detection
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Solution Overview
Problem
Conventional substrate processing apparatuses face issues with pipe damage and liquid leakage due to repetitive deformation and rubbing between pipes, leading to contamination and damage of the apparatus.
Innovation Solution
A substrate processing apparatus is designed with a protective pipe surrounding the outer periphery of the pipes to prevent damage and leakage, featuring a nozzle that discharges processing liquid to a substrate, a pipe connected to the nozzle, a nozzle driver for movement, and a leak sensor to detect any leaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the nozzles are made movable to enable positioning and processing operations, then the productivity and flexibility of the substrate processing apparatus is improved, but the pipes connected to the nozzles undergo repetitive deformation and rubbing which reduces their reliability and leads to damage
Solution Approach 1:
The patent applies the nesting principle by placing the movable nozzle assembly inside a protective pipe that remains stationary. The nozzle can move within the protective pipe's interior space, while the protective pipe itself stays fixed in position. This allows the nozzle to perform positioning and processing operations without the connected pipes undergoing repetitive deformation, thus maintaining both productivity and pipe reliability.
2Device complexity
If multiple pipes are arranged in proximity to supply processing liquid to nozzles, then the device complexity is reduced and space is saved, but the pipes rub against one another which reduces their reliability and increases the risk of breakage
Solution Approach 1:
The patent applies the merging principle by enclosing multiple pipes within a single protective pipe. Instead of having multiple separate protective structures for each pipe, all pipes are combined within one common protective enclosure. This reduces device complexity while preventing the pipes from rubbing against each other, as they are contained within the same protective space, thus maintaining their integrity.
3Adaptability or versatility
If the pipes are configured to be movable along with the nozzles, then the adaptability of the liquid supply system is improved, but the repetitive deformation and bending reduces the duration of action and leads to pipe damage
Solution Approach 1:
The patent applies segmentation by dividing the pipe system into two distinct parts: a stationary protective pipe and a movable nozzle assembly. The protective pipe remains fixed and provides a stable, durable structure that does not undergo repetitive deformation. The nozzle assembly can move adaptively within the protective pipe's space, maintaining system versatility while the stationary protective pipe ensures long service life by avoiding continuous mechanical stress.
Data Source
AI summary
A substrate processing apparatus includes a nozzle, a pipe, a protective pipe, a nozzle driver, and a leak sensor. The nozzle discharges a processing liquid to a substrate to be processed. The pipe is connected to the nozzle. The protective pipe surrounds an outer periphery of the pipe. The nozzle driver moves the nozzle. The leak sensor detects a leak liquid from the pipe.