Substrate Transport Order Switching for Restricted Process Chambers
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Solution Overview
Problem
In semiconductor device manufacturing, existing substrate processing systems face inefficiencies in controlling the transporting order of semiconductor substrates between multiple process chambers, leading to reduced productivity due to restricted access in some chambers.
Innovation Solution
A substrate processing system with a control server that logically controls the transporting order by switching between different process cycles based on the availability of process chambers, allowing restricted chambers to be used once their restrictions are lifted, thereby optimizing the use of available chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fixed transporting order is used in substrate processing equipment with multiple process chambers, then the control system is simple and easy to operate, but productivity decreases when some process chambers are restricted or unavailable
Solution Approach 1:
The transporting order is made dynamic rather than fixed. The control server automatically switches between first and second transporting orders based on the availability status of process chambers. When chambers become restricted or available, the system dynamically adjusts the transporting sequence to optimize substrate processing throughput without requiring complex manual reconfiguration.
Solution Approach 2:
The system changes the transporting order parameter based on chamber availability conditions. By switching between predefined transporting order configurations (first order and second order) according to the operational status of process chambers, the system adapts to changing conditions while maintaining controlled complexity through parameter switching rather than complete system redesign.
2Reliability
If process chambers are taken out of service for maintenance or repair, then chamber reliability is improved, but substrate processing productivity decreases due to restricted access
Solution Approach 1:
The system prepares multiple transporting order configurations in advance (first transporting order and second transporting order) to accommodate different chamber availability scenarios. When maintenance or repair is needed, the control server can switch to a pre-configured transporting order that routes substrates through available chambers, minimizing productivity impact while allowing necessary maintenance activities.
3Adaptability or versatility
If the transporting order is fixed, then the control system is simple to operate, but the system cannot adapt when process chamber availability changes
Solution Approach 1:
The control server automatically monitors process chamber availability and self-adjusts the transporting order without requiring manual intervention. The system serves itself by detecting chamber status changes and autonomously switching between transporting order configurations, maintaining ease of operation while achieving high adaptability to changing chamber availability conditions.
Data Source
AI summary
A substrate processing system includes manufacturing process equipment including a plurality of process chambers and a control server configured to control the manufacturing process equipment. When a transporting order of semiconductor substrates is transmitted from the control server to the manufacturing process equipment, the control server provides, to the manufacturing process equipment performing an Nth process cycle (where N is a natural number) in a first transporting order, a command to switch to a second transporting order from an N+1th process cycle immediately when a restriction on at least one process chamber, into which insertion of the semiconductor substrate is restricted, is lifted.