Substrate Orientation Mechanism in Climatic Chamber
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Solution Overview
Problem
Existing devices for measuring positions on substrates do not allow for flexible orientation of substrates, limiting the ability to determine their current orientation efficiently.
Innovation Solution
A device with a climatic chamber, a coordinate measuring machine, and a transport system that includes a means for orienting substrates within or outside the chamber, using a camera and illumination for orientation determination, allowing for automatic alignment of substrates with respect to the coordinate system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If substrates are deposited on the measurement table directly without an orienting means, then the device structure is simpler, but the substrate orientation flexibility and measurement efficiency are reduced
Solution Approach 1:
The device is segmented into distinct functional modules: a transport means for substrate delivery, a separate orienting means with rotation mechanism for orientation adjustment, and a measurement table for measurement. This segmentation allows each component to perform its specific function efficiently while maintaining overall system flexibility and manageability.
Solution Approach 2:
The orienting means incorporates a rotation mechanism that enables dynamic adjustment of substrate orientation. The substrate can be rotated to different angles and positions before being deposited on the measurement table, providing adaptability for measuring structures in various orientations without requiring multiple fixed measurement tables.
2Productivity
If substrates are removed from the climatic chamber for orientation adjustment, then the orienting operation is simpler, but the temperature adaptation time is increased and measurement throughput is reduced
Solution Approach 1:
The orienting means is merged with the climatic chamber environment, allowing substrate orientation adjustment to occur inside the chamber rather than outside. The transport means delivers substrates directly to the orienting means within the climatic chamber, enabling continuous temperature adaptation and eliminating the need to remove substrates for orientation adjustment.
Solution Approach 2:
The system includes illumination means and imaging means that automatically provide lighting and capture images of the substrate for orientation determination. The evaluation unit automatically processes these images to determine substrate orientation, reducing manual intervention and enabling the system to serve itself in the orientation determination process.
3Productivity
If manual orientation determination is used, then the device structure is simpler, but the measurement time and productivity are reduced
Solution Approach 1:
The manual visual inspection and orientation determination process is replaced with an automated imaging and evaluation system. The imaging means captures images of the substrate, and the evaluation unit automatically processes these images to determine orientation, replacing mechanical/manual operations with optical and computational systems.
Solution Approach 2:
The evaluation unit provides feedback about the substrate orientation based on image analysis. This feedback is used by the control unit to adjust the rotation mechanism and achieve the desired orientation, creating a closed-loop control system that automatically corrects orientation deviations and ensures precise positioning for measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible orientation and efficient determination of substrate orientation, reducing the need for repeated temperature adaptation and enhancing measurement throughput by allowing substrates to remain within the climatic chamber during orientation and measurement.
Implementation Method 1
The means for orienting includes an illumination means and a camera
Data Source
AI summary
A device for measuring positions of structures (3) on a substrate (2) is disclosed, wherein the device is enclosed by a climatic chamber (30). An illumination and imaging means (6, 14) is also arranged in the climatic chamber (30). At least one loading station (32) for substrates is formed on an outer wall (30a) of the climatic chamber (30), wherein at least one transport means (34, 40) for transporting the substrates is provided within the climatic chamber (30). A means (36) for orienting the substrates (2) with respect to a coordinate system of the coordinate measuring machine (1) is provided, wherein the transport means (34, 40) deposits the substrates (2) on the means (36) for orienting.