Substrate Processing Parameter Management via Category Switching
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Solution Overview
Problem
Conventional substrate processing apparatuses require cumbersome and time-consuming procedures to change parameters, leading to inefficiencies and potential malfunctions due to the limited capabilities of parameter changing tools and the risk of mistakes during the version upgrading process.
Innovation Solution
A substrate processing apparatus with a storage device categorizing parameters into multiple categories, a control device for processing based on these parameters, a parameter changing device that allows category changes, and a category change defining device to specify and alter parameter categories, enabling users to easily modify parameters and reduce errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a parameter changing tool is used to change parameters during software version upgrading, then parameters can be changed, but the procedure is cumbersome and time-consuming
Solution Approach 1:
The patent applies preliminary action by pre-categorizing parameters into groups (operation parameters, maintenance parameters, specification parameters) before the actual parameter changing operation. This pre-organization allows the system to automatically manage and switch between parameter sets during software version upgrades, eliminating the need for manual, step-by-step parameter changing procedures and significantly reducing the time required.
Solution Approach 2:
The patent uses copying by creating multiple parameter sets (first parameter set, second parameter set) that can be independently managed and switched. During software version upgrading, the system can copy parameter values between different sets or restore from backup parameter sets, avoiding the need to manually re-enter or reconfigure each parameter individually, thus reducing both time and operational complexity.
2Adaptability or versatility
If multiple parameter changing tools are used to change many parameters, then all parameters can be changed, but the procedure must be repeated many times
Solution Approach 1:
The patent applies universality by creating a single parameter management system that can handle all parameter changing needs across different software versions. The system includes a parameter storage unit that stores multiple parameter sets, a determination unit that identifies which parameters need changing, and a changing unit that executes the changes. This unified multi-functional system replaces the need for multiple separate parameter changing tools, simplifying the overall system while maintaining comprehensive parameter changing capability.
3Ease of operation
If parameters are changed using conventional tools, then parameter values can be modified, but mistakes are liable to be made causing malfunctioning
Solution Approach 1:
The patent applies feedback by implementing a determination unit that automatically identifies which parameters need to be changed based on the current software version and the target parameter set. This intelligent determination mechanism provides feedback control, preventing operators from making incorrect manual changes and ensuring that only the necessary parameters are modified with the correct values, thereby maintaining system reliability while allowing easy parameter modification.
Solution Approach 2:
The patent uses preliminary action by pre-defining correct parameter values and relationships in the parameter storage unit before actual operation. The system has already determined the appropriate parameter settings for different software versions in advance, so during operation, it only needs to retrieve and apply these pre-validated parameter sets, eliminating the risk of operational mistakes while maintaining ease of parameter modification.
Data Source
AI summary
A substrate processing apparatus which enables parameters for carrying out processing on substrates to be changed easily by a user. A storage device stores parameters that are for controlling the processing and are categorized into a plurality of categories. A control device carries out the processing on the substrate based on the parameters. A parameter changing device enables each of the parameters to be changed in accordance with the category of that parameter. A parameter category changing device changes the category of some of the parameters. A category change defining device is detachable from the substrate processing apparatus and specifies parameters whose category is to be changed out of the parameters. The parameter category changing device changes the category of each of the parameters specified by the category change defining device.