Substrate Processing Parameter Selection Using Model Identification
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses require significant manual effort to adjust control parameters for individual constituent elements due to their varying characteristics, leading to time-consuming operations.
Innovation Solution
A control assistance device and method that utilize a correspondence relationship between model identification information and parameter values to automatically determine appropriate control parameters for constituent elements based on processing information, reducing the need for manual adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual adjustment of control parameters is performed for each constituent element, then individual characteristics can be accommodated, but significant time and labor are required
Solution Approach 1:
The system pre-acquires correspondence relationships between model identification information and parameter values before actual operation. Multiple determination models are prepared in advance, each with associated parameter values stored in a database. When a constituent element needs parameter determination, the system simply queries the pre-prepared correspondence relationship rather than performing manual adjustment, thus eliminating time-consuming manual work while maintaining accurate parameter selection based on individual characteristics.
2Ease of operation
If manual teaching operation is performed for each constituent element and processing recipe, then proper control parameters can be determined, but the work is extremely time-consuming
Solution Approach 1:
The system creates determination models that copy and represent the characteristics of constituent elements. Instead of manually teaching each individual element, the system builds determination models based on model identification information that captures the essential characteristics. These models serve as templates that can be quickly queried and applied, replacing time-consuming manual teaching operations with automated model-based parameter determination.
Solution Approach 2:
The system transforms the manual adjustment process into an automated parameter query process. By establishing correspondence relationships between model identification information and parameter values, the system changes the operational mode from manual teaching and adjustment to automated retrieval and application of parameters, significantly improving setup efficiency while maintaining operational simplicity.
3Reliability
If multiple determination models are used to handle individual differences, then accurate parameter determination is possible, but system complexity increases
Solution Approach 1:
The system introduces model identification information as an intermediary between the constituent element and the parameter determination process. Instead of directly handling complex individual characteristics of each element, the system uses model identification information to select appropriate determination models. This intermediary layer simplifies the system structure by providing a standardized interface for model selection while maintaining high determination accuracy through the use of multiple specialized determination models.
Data Source
AI summary
A control assistance device that determines a parameter value which is a value of a control parameter for control of a constituent element in a substrate processing apparatus, includes a correspondence relationship acquirer that acquires a correspondence relationship between a plurality of model identification information pieces for identification of a plurality of respective determination models that respectively determine normality degrees of operations of the constituent element based on processing information pieces representing operations or states relating to a process executed on a substrate by the substrate processing apparatus, and a plurality of parameter values, an information acquirer that acquires a model identification information piece corresponding to a determination model, among the plurality of determination models, that is configured to obtain a proper determination result based on processing information pieces during an operation of the constituent element, and a determiner that determines the parameter value for control of the constituent element based on the correspondence relationship acquired by the correspondence relationship acquirer and the model identification information piece acquired by the information acquirer.