Substrate Transport and Parking for Coordinate Measuring Machines
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Solution Overview
Problem
The time-consuming preparation of substrates for measurement in complex and expensive measuring apparatuses leads to suboptimal utilization, as temperature adaptation and alignment processes are lengthy and often require waiting for temperature stabilization within climate-controlled chambers.
Innovation Solution
A method and device that involve transporting a first substrate to a parking station while measuring a second substrate, allowing for simultaneous preparation and measurement processes, including temperature adaptation and alignment, thereby optimizing the use of measuring apparatuses by reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If substrates are prepared (temperature adaptation and alignment) before introduction into the measuring apparatus, then measurement accuracy is ensured, but the preparation time increases and apparatus utilization decreases
Solution Approach 1:
The substrate is transported to the parking station and prepared (temperature adaptation, alignment) in advance before the measurement process begins. This preliminary action allows the substrate to be ready when needed, ensuring measurement accuracy while reducing waiting time during the actual measurement process.
Solution Approach 2:
The measuring apparatus maintains continuous operation by having substrates pre-prepared in the parking station. While one substrate is being measured, another is being prepared simultaneously, eliminating idle time and ensuring continuous useful action in the measurement process.
2Productivity
If substrates are transported and prepared outside the climate-controlled chamber, then preparation time is reduced and apparatus utilization improves, but temperature adaptation time increases
Solution Approach 1:
The substrate is transported to the parking station within the climate-controlled chamber before measurement begins. This preliminary transport and preparation within the controlled environment eliminates temperature adaptation delays during the measurement process, as the substrate is already at the correct temperature when measurement starts.
Solution Approach 2:
The substrate remains in the climate-controlled chamber during transport to the parking station and during preparation, maintaining continuous temperature control. This ensures the substrate is always at the required temperature, eliminating interruptions for temperature adaptation and maintaining continuous useful action.
3Ease of operation
If multiple substrates are handled sequentially, then process simplicity is maintained, but measurement capacity utilization decreases
Solution Approach 1:
The substrate handling process is segmented into distinct stages: transport to parking station, preparation (alignment and temperature adaptation), and measurement. This segmentation allows different substrates to be at different stages simultaneously, enabling parallel processing while maintaining simple, standardized procedures for each stage.
Solution Approach 2:
The parking station serves as an intermediary between substrate storage and the measurement apparatus. It buffers and prepares substrates before they enter the measurement process, allowing the measuring apparatus to operate continuously without waiting for substrate preparation, thus improving capacity utilization while keeping the measurement process simple.
Data Source
AI summary
A method for introducing a substrate into a measuring apparatus, in particular a lithography mask into a coordinate measuring machine, includes the following steps: a) providing a first substrate in a start station; b) transporting the first substrate to a parking station; c) transporting a second substrate from the measuring apparatus to the start station; and d) transporting the first substrate from the parking station into the measuring apparatus. Measurements are carried out on the second substrate during the process of introducing the first substrate. A device for carrying out the method is also provided.