Display Substrate Peeling Stage With Static Charge Neutralization
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Solution Overview
Problem
Existing methods for separating substrates from electrostatic chucks in display device manufacturing are inefficient, particularly for organic light emitting diode displays, which require a more effective and easy peeling process.
Innovation Solution
A peeling device and method utilizing a transport unit, a rotatable peeling stage, a support with gripper, and a static eliminator to facilitate the separation of substrates from electrostatic chucks by rotating the peeling stage, inserting a gripper, releasing clamps, and using ions to neutralize electrostatic forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual peeling methods are used to separate substrates from electrostatic chucks, then the process is simple in terms of device complexity, but the productivity is low and manual intervention is required
Solution Approach 1:
The peeling device is divided into multiple functional modules: a transport unit for moving carriers, a rotatable peeling stage for positioning substrates, a support with gripper for substrate handling, and a static eliminator for charge neutralization. Each module performs a specific function, allowing the system to achieve high productivity through automated sequential operations while keeping each component relatively simple and manageable.
Solution Approach 2:
The gripper acts as an intermediary between the support and the substrate, enabling automated substrate handling without direct manual contact. The static eliminator serves as an intermediary that neutralizes electrostatic charges between the substrate and electrostatic chuck, facilitating easy separation. These intermediaries enable automation while maintaining operational simplicity.
2Ease of operation
If electrostatic chuck is used to hold substrate, then the substrate positioning is stable and precise, but the separation process becomes difficult and time-consuming
Solution Approach 1:
The static eliminator is positioned to neutralize electrostatic charges on the substrate before the separation process begins. By applying preliminary anti-action (charge neutralization) before the harmful effect (electrostatic adhesion) takes hold, the device enables easy substrate separation while maintaining reliable substrate holding during the manufacturing process. The gripper is pre-positioned to engage with the substrate once electrostatic forces are neutralized.
3Extent of automation
If automated peeling device is implemented, then the productivity increases and manual intervention is reduced, but the device complexity and initial investment increase
Solution Approach 1:
The peeling stage is designed to perform multiple functions: it rotates to position substrates at different angles, supports the substrate during gripper engagement, and facilitates smooth transition between holding and separation modes. The support structure provides both positioning and movement functions. This multi-functionality reduces the need for separate dedicated components, thereby reducing overall device complexity while maintaining high automation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and efficient separation of substrates from electrostatic chucks, improving the manufacturing process for display devices by reducing manual intervention and enhancing substrate handling.
Implementation Method 1
providing ions between the electrostatic chuck and the substrate through a nozzle of the static eliminator
Data Source
AI summary
A peeling device includes: a transport unit; a carrier movable on and along the transport unit and having a substrate tray accommodated therein; a rotatable peeling stage disposed on the transport unit; a support disposed on the peeling stage and movable on the peeling stage along an upstream direction of the transport unit, a downstream direction of the transport unit, a downward direction toward the peeling stage, and an upward direction opposite to the downward direction, and rotatable in a first rotation direction, and a second rotation direction opposite to the first rotation direction; a gripper connected to the support so as to be disposed between the support and the peeling stage; and a static eliminator disposed on a side of the peeling stage.