Substrate Transfer Alignment Correction Between Delivery And Receiving Picks
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
There is a possibility that the position of the substrate is shifted during substrate processing in the processing chamber, necessitating a method to correct the positional shift and transfer the substrate accurately to a carrier.
Innovation Solution
A substrate transfer method that involves detecting the shift amount of substrates held by a pick, calculating correction amounts for delivery and receiving positions, and adjusting the transfer device's movements to align the substrates correctly within the system, ensuring accurate transfer to mounting sections in different chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the substrate is transferred without position correction, then the transfer process is simple and fast, but the substrate position accuracy deteriorates due to possible shifts during processing
Solution Approach 1:
The patent applies preliminary action by detecting the substrate position shift and calculating the correction amount before the actual transfer operation. The first robot adjusts its delivery position in advance based on the detected shift, ensuring accurate placement without requiring complex real-time adjustment mechanisms during transfer.
Solution Approach 2:
The patent implements feedback by using a sensor to detect the actual position of the substrate on the wafer, comparing it with the intended position, and using this information to calculate and apply a correction amount. This closed-loop feedback ensures position accuracy while keeping the transfer mechanism relatively simple.
2Manufacturing precision
If additional adjustment mechanisms are added to correct substrate position, then position accuracy improves, but device complexity and system configuration increase
Solution Approach 1:
The patent applies universality by making the existing robot systems perform multiple functions: they not only transfer substrates but also detect position shifts and calculate correction amounts. The first robot's controller serves both as a transfer controller and a position correction calculator, eliminating the need for separate adjustment mechanisms.
Solution Approach 2:
The system applies self-service by enabling the robots to automatically detect their own position deviations and calculate necessary corrections without external intervention. The controllers use sensor data to self-correct the delivery and receiving positions, simplifying the overall system architecture.
3Manufacturing precision
If the delivery position and receiving position are corrected based on substrate shift, then transfer accuracy improves, but the transfer process time increases
Solution Approach 1:
The patent minimizes time loss by performing position detection and correction amount calculation as preliminary actions that overlap with or precede the transfer motion. The correction is calculated in advance based on detected shift, allowing the robot to move directly to the corrected position without intermediate adjustment steps during the transfer.
Data Source
AI summary
A substrate transfer method includes receiving first and second substrates by a pick of a first transfer device, detecting shift amounts of the first and second substrates, calculating a correction amount of a delivery position of the pick based on the shift amount of the first substrate, and moving the pick to the corrected delivery position to respectively deliver the first and second substrates to a first and second mounting sections, moving a first pick of a second transfer device to a receiving position of the first mounting section to receive the first substrate, calculating a correction amount of a receiving position of a second pick of the second transfer device based on the correction amount of the delivery position and the shift amount of the second substrate; and moving the second pick to the corrected receiving position of the second pick to receive the second substrate.