Substrate Support Pillar Pins for Stable Supercritical Drying
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Solution Overview
Problem
Existing substrate drying apparatuses using supercritical fluids face issues with pillar vibration, rotation, or movement, leading to particle generation and uneven drying, due to the unsupported nature of the pillar structure.
Innovation Solution
The apparatus includes a pillar unit with a pillar plate and legs, where the legs are fixed to the vessel using a lower pin and an upper pin that is detachably coupled, allowing for adjustable height and inclination, and using materials with different thermal conductivities to minimize temperature non-uniformity and prevent vibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the pillar is not fixedly attached to the vessel during processes to facilitate removal, then the ease of operation is improved, but the pillar vibrates, rotates, or moves due to supercritical fluid supply causing particle generation and uneven drying
Solution Approach 1:
The pillar support structure is divided into multiple segments: the vessel bottom, the pillar body, and the support legs. This segmentation allows the pillar to be firmly supported during operation while enabling easy removal by detaching the support legs from the vessel bottom.
Solution Approach 2:
The support legs are preliminarily positioned to extend downward from the pillar and are attachable to the vessel bottom before the supercritical fluid supply begins. This preliminary positioning ensures the pillar is stabilized in advance, preventing vibration and rotation during the drying process.
2Stability of the object's composition
If the pillar legs are placed on the bottom of the vessel to support the pillar, then the stability is improved, but the pillar still experiences vibration and movement when supercritical fluid is supplied to the lower area
Solution Approach 1:
The harmful effect of direct supercritical fluid supply to the lower area of the pillar is eliminated by extracting or removing the fluid supply from that region. The support legs are designed to prevent fluid from reaching the pillar base, thereby eliminating the source of vibration and particle generation.
Solution Approach 2:
The support legs act as an intermediary structure between the vessel bottom and the pillar. They provide mechanical support to stabilize the pillar while simultaneously serving as a barrier to prevent supercritical fluid from reaching the lower area of the pillar, thus eliminating the harmful effects.
3Adaptability or versatility
If the upper pin is detachably coupled to the lower pin to allow adjustment of height and inclination, then the adaptability is improved, but the device complexity increases
Solution Approach 1:
The pillar support structure transitions from a static, fixed configuration to a dynamic, adjustable one. The upper pin is detachably coupled to the lower pin, allowing the pillar height and inclination to be adjusted according to different processing requirements. This dynamic design enables versatility while maintaining relatively simple structural elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables stable substrate support, preventing vibration and rotation, ensuring uniform drying and temperature consistency during supercritical processing.
Implementation Method 1
the legs include: a lower pin fixed to the underside of the vessel; and an upper pin detachably coupled to the lower pin and inserted in a through-hole of the pillar plate
Implementation Method 2
when drying is performed, if a supercritical fluid is supplied to the lower area of the pillar, vibrations may occur in the pillar or the pillar is rotated or moved due to the supercritical fluid
Data Source
AI summary
The present disclosure provides an apparatus for treating substrates. In an embodiment, the apparatus for treating substrates includes: a vessel having a processing space therein; a supply port supplying a process fluid to the processing space; and a pillar unit provided in the vessel and supporting a substrate when the substrate is processed in the vessel, wherein the pillar unit includes: a pillar plate; and legs supporting the pillar plate from an underside of the vessel, and the legs include: a lower pin fixed to the underside of the vessel; and an upper pin detachably coupled to the lower pin and inserted in a through-hole of the pillar plate.