Substrate Pitch Conversion With Dual-Groove Holding Members
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in aligning substrates at a narrower pitch to reduce processing liquid usage while maintaining dimensional accuracy and vertical orientation of holding members.
Innovation Solution
A substrate processing apparatus with a pitch converting unit that alternates between unequal and narrow pitches using holding members with two grooves spaced by a first interval, allowing for wider holding members and improved dimensional accuracy, and a moving unit to switch between these pitches.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If fifty holding members are used to hold fifty substrates at a narrow pitch, then the substrates can be aligned at a narrower pitch to reduce processing liquid usage, but the holding members become difficult to ensure dimensional accuracy and maintain vertical orientation
Solution Approach 1:
The pitch converting unit is divided into multiple holding members, each responsible for holding a specific subset of substrates. By segmenting the holding function, each holding member can be designed with appropriate dimensions to maintain manufacturing precision while collectively achieving narrow pitch alignment of all substrates.
Solution Approach 2:
The patent introduces a moving unit that operates in the alignment direction to adjust the positions of holding members. This adds a dimensional degree of freedom, allowing the system to achieve narrow pitch alignment through positional adjustment rather than requiring each holding member to be manufactured with extremely tight dimensional tolerances.
2Quantity of substance
If the pitch between substrates is reduced to narrow pitch, then processing liquid usage is reduced, but it becomes difficult to maintain vertical orientation of holding members
Solution Approach 1:
The holding members are designed to be movable in the alignment direction through the moving unit. This dynamic capability allows the holding members to adjust their positions to maintain vertical orientation even when substrates are aligned at narrow pitch, preventing structural deformation while achieving the desired compact arrangement.
3Manufacturing precision
If holding members are made wider to ensure dimensional accuracy, then manufacturing precision is improved, but the ability to hold substrates in vertical orientation is compromised
Solution Approach 1:
The moving unit is configured to preliminarily adjust the positions of holding members before substrate holding begins. This preliminary positioning action ensures that holding members are correctly aligned in the vertical orientation, allowing them to maintain both dimensional accuracy and proper orientation during substrate handling.
Data Source
AI summary
A substrate processing apparatus includes a pitch converting unit that converts a pitch of a plurality of substrates between an unequal pitch at which a first interval and a second interval wider than the first interval are alternately repeated and a narrow pitch at which the first interval is repeated. The pitch converting unit includes: the plurality of holding members that hold the plurality of substrates aligned at the unequal pitch; and the moving unit configured to move the plurality of holding members in the alignment direction of the plurality of substrates so as to switch the plurality of substrates between an unequal pitch arrangement in which the plurality of substrates are aligned at the unequal pitch, and a narrow pitch arrangement in which the plurality of substrates are aligned at the narrow pitch. Each of the plurality of holding members has two holding grooves for holding two substrates, respectively. The two holding grooves are spaced apart by a first interval.