Substrate Storage Pod Exhaust Space Design
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Solution Overview
Problem
Conventional substrate storage pods fail to effectively collect and discharge dust from the atmosphere, leading to potential oxidation and contamination of substrates during processing steps.
Innovation Solution
The pod design incorporates a multi-hole partition member and an exhaust space with a larger inner surface area than the exhaust port's flow path, creating a lower pressure area that attracts and retains dust and oxygen, ensuring efficient collection and discharge of these contaminants through the exhaust port.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional exhaust port design is used, then gas replacement is performed, but dust is not effectively collected and may return to pod interior
Solution Approach 1:
The exhaust system is segmented into two distinct functional zones: a dust collection space positioned below the substrate shelf level that traps dust particles, and a clean gas exhaust path above the shelf level that allows replacement gas to exit. This segmentation prevents dust-laden gas from mixing with the clean exhaust path, ensuring dust is collected and removed without contaminating the substrate environment.
Solution Approach 2:
A dust collection space acts as an intermediary zone between the substrate storage area and the exhaust port. This intermediate space captures and holds dust particles that settle during gas replacement, preventing them from being carried back into the pod interior by exhaust flow, thus serving as a buffer that protects substrate cleanliness.
2Quantity of substance
If gas replacement is performed to maintain cleanliness, then oxygen and dust are removed, but dust may return to pod interior during exhaust
Solution Approach 1:
The exhaust port is positioned at a height above the substrate shelf level, creating a vertical dimension separation. Dust particles that settle during gas replacement are confined to the lower region below shelf level, while the exhaust port draws gas from the upper region above shelf level. This vertical dimensional separation ensures dust-free gas is exhausted while settled dust remains trapped below.
Solution Approach 2:
The dust collection space is pre-positioned below the substrate shelf level before gas replacement begins. As replacement gas flows through the pod, dust particles naturally settle into this pre-prepared collection zone, where they are trapped by the geometry of the space and the positioning of the exhaust port above, preventing dust from being carried out with the exhaust flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents dust and oxygen from returning to the pod's interior, maintaining a clean environment for substrates by ensuring complete removal of contaminants during gas replacement, thus enhancing the cleanliness and oxidation resistance within the pod.
Implementation Method 1
an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port... an area of a region of the inner surface of the pod case is larger than a sectional area of a flow path of the exhaust port
Data Source
AI summary
The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.