Substrate Position Correction via Rotation and Oblique Motion
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Solution Overview
Problem
Conventional conveyance technologies for substrates with notches suffer from positional deviations due to multiple transport robots, leading to reduced throughput and dust production during mechanical centering, and are difficult to adjust accurately.
Innovation Solution
A position correcting apparatus that rotates the substrate around a central axis, uses an oblique correcting and moving device to align the substrate without contact, and includes a detection system to calculate and correct positional errors, allowing for precise positioning without operating transport robots.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple transport robots are used to convey substrates, then productivity is improved, but manufacturing precision deteriorates due to accumulated positional deviations
Solution Approach 1:
The patent replaces mechanical contact-based centering with a non-contact optical detection system. A camera captures images of the substrate's notch, and a correction device calculates positional deviations to generate correction amounts, eliminating mechanical errors while maintaining high throughput
Solution Approach 2:
The patent uses optical imaging to create a visual copy of the substrate position via camera capture. The detected notch position is copied into digital data, allowing precise measurement and correction without physical contact or mechanical intervention
2Manufacturing precision
If mechanical centering devices are used to correct substrate positions, then manufacturing precision is improved, but object-generated harmful factors worsen due to dust production
Solution Approach 1:
The patent completely eliminates mechanical contact between centering devices and substrates by using optical detection (camera) and non-contact correction mechanisms. This substitution prevents dust generation from mechanical friction and contact while achieving precise centering through digital calculation and correction
Solution Approach 2:
The patent introduces light as an intermediary between the detection system and substrate. The camera uses light to detect notch position without physical contact, and the correction system uses calculated correction amounts as an intermediary to achieve precise positioning without mechanical contact that would generate dust
3Ease of operation
If conventional transport robot operations are used, then ease of operation is maintained, but manufacturing precision deteriorates due to inability to correct positional deviations
Solution Approach 1:
The patent implements a feedback mechanism where the camera continuously detects substrate notch position, the correction device calculates deviations from the ideal position, and correction amounts are applied to adjust subsequent substrate placement. This closed-loop feedback system maintains operational simplicity while achieving high precision through automatic correction
Solution Approach 2:
The system performs self-correction by automatically detecting positional deviations and generating correction amounts without requiring manual intervention. The correction device autonomously adjusts substrate positioning based on detected errors, maintaining ease of operation while improving manufacturing precision
Data Source
AI summary
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.