Substrate Position Detection Using Susceptor Marks
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Solution Overview
Problem
In semiconductor device fabrication, accurate substrate positioning is crucial for uniform film deposition, but existing methods require precise alignment of the substrate position detection apparatus with the chamber, which is time-consuming and reduces apparatus usage efficiency.
Innovation Solution
A substrate position detection method and apparatus that uses image-taking units to detect position marks on the susceptor and chamber, allowing for accurate substrate positioning without requiring precise alignment of the detection apparatus with the chamber, enabling efficient detection and positioning of substrates during film deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the substrate position detection apparatus is arranged with high accuracy on the ceiling plate, then the substrate position detection precision is improved, but the apparatus setup time increases and usage efficiency decreases
Solution Approach 1:
The system uses the susceptor's own rotational movement and pre-existing marks as references for self-positioning. The imaging apparatus captures images of the susceptor marks, and the control unit automatically calculates the substrate receiving portion's position based on these images, enabling the system to self-adjust without requiring precise manual alignment of the detection apparatus.
Solution Approach 2:
The susceptor serves as an intermediary reference object between the imaging apparatus and the substrate. By detecting the position of marks on the susceptor rather than directly detecting substrate position relative to the chamber, the system decouples the detection apparatus positioning from the substrate positioning accuracy.
2Measurement precision
If the substrate position detection apparatus is arranged with high accuracy on the ceiling plate, then the substrate position detection precision is improved, but the maintenance efficiency decreases
Solution Approach 1:
The system automatically recalibrates by capturing images of the susceptor marks after maintenance. The control unit calculates the substrate receiving portion position based on newly captured images, allowing the system to self-recover detection accuracy without requiring precise re-alignment of the imaging apparatus during maintenance activities.
Solution Approach 2:
The susceptor marks are pre-positioned on the susceptor before maintenance activities. These marks serve as predetermined reference points that enable quick re-calibration after maintenance, eliminating the need for time-consuming realignment procedures.
3Device complexity
If the imaging apparatus captures images of the substrate and susceptor through the ceiling plate window, then the optical system is simplified and remote detection is enabled, but the detection accuracy decreases when the apparatus is not precisely aligned
Solution Approach 1:
The susceptor marks serve as an intermediary reference layer between the imaging apparatus and the substrate. The system detects the position of these marks on the rotating susceptor and uses them to calculate the substrate receiving portion position, compensating for any misalignment of the imaging apparatus.
Solution Approach 2:
The system utilizes the dynamic rotation of the susceptor to capture multiple positional references. By tracking the susceptor marks during rotation, the system can determine the substrate receiving portion position even when the imaging apparatus has fixed positioning errors.
Data Source
AI summary
A substrate position detection method includes rotating the susceptor so that the substrate receiving portion is moved into an image taking area of a imaging apparatus; detecting first two position detection marks provided in the process chamber so that the first two position detection marks are within the image taking area, wherein a first perpendicular bisector of the first two position detection marks passes through a rotational center of the susceptor; detecting second two position detection marks provided in the susceptor so that the second two position detection marks can be within the image taking area, wherein a second perpendicular bisector of the second two position detection marks passes through the rotational center of the susceptor and a center of the substrate receiving portion; and determining whether the substrate receiving portion is positioned in a predetermined range in accordance with the detected first two and second two position detection marks.