Substrate Position Measuring Unit for Transfer Device Collision Avoidance
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Solution Overview
Problem
The movement of substrate transfer devices is limited by sensors used to detect relative positions between substrate holders and substrates, which can lead to collisions and reduced reliability in substrate transfer processes.
Innovation Solution
A substrate position measuring unit is independently disposed from the substrate transfer device, allowing it to detect the position of the substrate held by the substrate holder without limiting the movement of the transfer device, enabling accurate positional correction and improved reliability in substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensors are attached to the substrate transfer device to detect relative positions, then measurement precision is improved, but device complexity increases and movement is limited
Solution Approach 1:
The measurement function is segmented from the substrate transfer device. Instead of attaching sensors to the moving transfer device, a separate position detection device is installed on the stationary processing unit, dividing the system into independent measurement and transfer components.
Solution Approach 2:
A marker is introduced as an intermediary element. The marker is attached to the substrate holder and serves as a reference point for the position detection device, enabling indirect measurement without requiring direct sensor attachment to the moving parts.
2Measurement precision
If sensors are attached to the substrate transfer device, then measurement precision is improved, but reliability deteriorates due to collision risks
Solution Approach 1:
The measurement function is segmented from the substrate transfer device. Instead of attaching sensors to the moving transfer device, a separate position detection device is installed on the stationary processing unit, dividing the system into independent measurement and transfer components.
Solution Approach 2:
The position information is obtained indirectly through a marker that copies the positional state of the substrate holder. The position detection device reads the marker's position to infer the substrate holder's position, avoiding direct sensor attachment to moving parts.
3Device complexity
If the substrate position measuring unit is integrated with the substrate transfer device, then device complexity is reduced, but the movement of the transfer device is limited
Solution Approach 1:
The measurement function is segmented from the substrate transfer device. The position detection device is installed on the stationary processing unit rather than being integrated with the moving transfer device, allowing the transfer device to move freely without carrying measurement components.
Solution Approach 2:
The mechanical sensor attachment system is replaced with an optical or electromagnetic detection system. The position detection device uses non-contact methods (such as optical markers) to measure position, eliminating the need for mechanical coupling between the transfer device and measurement system.
Data Source
AI summary
A substrate processing apparatus includes: first and second places in which a substrate can be placed; a substrate transfer device having a substrate holder that holds the substrate to transfer the substrate between the first and second places; and a substrate position measuring unit that detects a position of the substrate held by the substrate holder. The substrate position measuring unit, disposed independently of the substrate transfer device, is arranged at a position where the substrate held by the substrate holder of the substrate transfer device can be placed.