Substrate Positioning Damping Mechanism for Vibration Control

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Solution Overview

Problem

The existing substrate positioning systems face challenges in achieving high precision in rotational positioning, leading to compromised bonding accuracy due to static balance issues when using non-contact air bearings, particularly at the nanometer level, where external vibrations can deviate the rotation center and affect the static balance.

Innovation Solution

A substrate positioning apparatus with a rotating device that incorporates a damping mechanism, utilizing a rail and slider system to generate a damping force against relative movements between the rotation shaft and the base member, enhancing the static balance and positioning accuracy by resisting external vibrations and maintaining precise rotation center alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a non-contact air bearing is used to support the rotation shaft, then friction and wear are eliminated, but static balance deteriorates due to sensitivity to external vibrations

Engineering Contradiction:

Improvefriction resistanceVSAvoidstatic balance

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

A damping device is introduced as an intermediary element between the rotation shaft and the external environment. This damping device absorbs and attenuates external vibrations before they can affect the rotation shaft's static balance, while allowing the air bearing to continue providing frictionless support. The damping device acts as a mediator that protects the sensitive air bearing system from environmental disturbances.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If high rotational precision is achieved at the nanometer level, then positioning accuracy improves, but sensitivity to external vibrations increases

Engineering Contradiction:

Improvepositioning accuracyVSAvoidvibration sensitivity

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The damping device provides beforehand cushioning by being pre-configured to absorb and dampen external vibrations before they can reach the rotation shaft and affect positioning accuracy. This protective measure is built into the system design, ensuring that high-precision rotational positioning remains stable even when subjected to external vibrational disturbances.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Ease of operation

If the rotation shaft is supported in a non-contact state, then operational smoothness improves, but stability against external disturbances deteriorates

Engineering Contradiction:

Improverotational smoothnessVSAvoidrotational stability

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The damping device serves as an intermediary that decouples the rotation shaft from external disturbances while maintaining its non-contact support. It allows the rotation shaft to operate smoothly without friction from contact bearings, while simultaneously providing stability by absorbing external vibrations that would otherwise disrupt the rotational motion.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The damping device improves the static balance of the rotation shaft, thereby enhancing the positioning accuracy of substrates in the rotational direction, which in turn improves the bonding accuracy of substrates, even under conditions of external vibrations.

Implementation Method 1

The damping device includes a rail connected to the base member and a slider connected to the rotation shaft, and is configured to produce a damping force against a relative operation between the rotation shaft and the base member by a resistance generated between the rail and the slider

Methodology Applied

Scientific EffectFriction: Friction

Implementation Method 2

The bearing member is configured to support the rotation shaft in a non-contact state

Methodology Applied

Scientific EffectAir bearing: Air Lubrication

Data Source

PatentUS11545383B2Substrate positioning apparatus, substrate positioning method, and bonding apparatus

Publication Date: 2023.01.03 TOKYO ELECTRON LTD

AI summary

A substrate positioning apparatus includes a holder and a rotating device. The holder is configured to hold a substrate. The rotating device is configured to rotate the holder. The rotating device includes a rotation shaft, a bearing member, a base member, a driving unit and a damping device. The rotation shaft is fixed to the holder. The bearing member is configured to support the rotation shaft in a non-contact state. The bearing member is fixed on the base member. The driving unit is configured to rotate the rotation shaft. The damping device includes a rail connected to the base member and a slider connected to the rotation shaft, and is configured to produce a damping force against a relative operation between the rotation shaft and the base member by a resistance generated between the rail and the slider.