Substrate Power Storage Layout to Block RF Noise Backflow
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges with RF noise propagation affecting AC power sources, requiring RF filters that attenuate power and occupy space, and are not efficient in supplying power to multiple units without increasing space requirements.
Innovation Solution
A substrate processing apparatus that uses a power storage part to supply DC power to units, eliminating the need for RF filters and optimizing power distribution by storing energy from an AC power source, which is then converted and managed using a power storage system to prevent noise propagation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If RF filters are used to suppress RF noise propagation to AC power sources, then noise suppression is improved, but power attenuation occurs and space is occupied
Solution Approach 1:
The invention extracts the harmful RF noise from the power supply system by introducing a power storage part (capacitor) that isolates the AC power source from the processing chamber. The capacitor stores power locally and supplies it to processing units, preventing RF noise generated in the chamber from propagating back to the AC power source through the power supply line.
Solution Approach 2:
The power storage part acts as an intermediary between the AC power source and the processing units. It receives power from the AC source, stores it temporarily, and then supplies it to the processing units, thereby decoupling the AC power source from RF noise generated during processing operations.
2Object-affected harmful factors
If RF filters are installed to block high-frequency noise, then noise suppression is improved, but device complexity and space requirements increase
Solution Approach 1:
The invention removes the need for complex RF filters by extracting the noise suppression function into a simple power storage component. Instead of using filters to block noise frequencies, the capacitor physically isolates the AC power source from the noise-generating processing chamber, eliminating the need for frequency-selective filtering components.
3Device complexity
If power is supplied directly from AC power source to multiple units, then power distribution is simplified, but RF noise propagation affects the AC power source
Solution Approach 1:
The invention segments the power distribution system into two distinct parts: (1) a simple AC power source connected only to the power storage part, and (2) multiple processing units connected to the power storage part. This segmentation allows the AC power source to remain isolated from RF noise while still supplying power to multiple units through the capacitor intermediary.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively suppresses RF noise propagation to AC power sources without the need for RF filters, ensuring efficient power supply to multiple units while saving space and maintaining uniform processing quality.
Implementation Method 1
a power storage part, and at least one unit or member that uses a power, wherein charges stored in the power storage part are supplied, as a power, to the unit or the member
Data Source
AI summary
A substrate processing apparatus comprises a power storage part and at least one unit or member that uses a power. Charges stored in the power storage part are supplied, as a power, to the unit or the member.