Substrate Processing Apparatus Abnormality Analysis Controller
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Solution Overview
Problem
In semiconductor manufacturing, managing the operation state of substrate processing apparatuses becomes increasingly complex due to the miniaturization of devices, leading to challenges in efficiently analyzing and resolving abnormalities, which prolongs downtime and reduces production efficiency.
Innovation Solution
A configuration that includes a device-status-monitoring controller for storing device data, an analysis-support controller to acquire and analyze abnormality-related data, and a display device to present this information in a time-series format from the execution of the latest recipe, facilitating quicker identification of issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If more delicate and elaborate data management is implemented to handle increased data complexity from device miniaturization, then data management capability is improved, but device complexity and operational burden increase
Solution Approach 1:
The substrate processing apparatus autonomously generates and manages its own operation data without requiring external management devices. The apparatus includes a data generation unit that creates operation data, a data storage unit that stores this data, and a data transmission unit that transmits it to management devices, enabling self-sufficient data management that reduces external system complexity
Solution Approach 2:
The data management system is divided into distinct functional units within the apparatus: data generation unit, data storage unit, and data transmission unit. This segmentation allows each unit to perform its specific function independently, improving data management capability while keeping the overall system organized and manageable
2Measurement precision
If comprehensive data collection and analysis is performed to identify abnormality causes, then diagnostic accuracy is improved, but analysis time and operational burden increase
Solution Approach 1:
The apparatus continuously collects and stores operation data in advance during normal operation through the data generation unit and data storage unit. When an abnormality occurs, this pre-collected data is immediately available for analysis, eliminating the need for time-consuming data collection during troubleshooting and enabling rapid diagonal diagnosis
Solution Approach 2:
The system transmits operation data to external management devices for analysis, and the results feed back to improve future diagnostics. The data transmission unit sends comprehensive operation data including process parameters and status information to management devices, enabling accurate remote diagnosis and reducing on-site analysis time
Data Source
AI summary
There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.