Substrate processing apparatus and fluid heating device
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Solution Overview
Problem
Existing substrate drying techniques using processing fluids in a supercritical state face challenges in maintaining consistent fluid temperature, leading to temperature fluctuations and inefficiencies in the drying process.
Innovation Solution
A substrate processing apparatus with a fluid heating system that includes line heaters to maintain consistent temperatures in both the supply and discharge channels, reducing temperature fluctuations and ensuring the fluid remains in a controlled state for efficient drying.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If processing fluid is circulated through pipes to and from the processing container, then the drying process can be performed, but temperature fluctuations occur in the fluid
Solution Approach 1:
The patent applies preliminary action by heating the pipes before fluid circulation begins. The first fluid heating device heats the supply pipe beforehand, and the second fluid heating device heats the discharge pipe beforehand, preventing temperature fluctuations during the actual drying process rather than correcting them afterward.
Solution Approach 2:
The patent implements feedback control through temperature sensors that continuously monitor the fluid temperature in both supply and discharge pipes. The heating devices are controlled based on temperature sensor readings, creating a closed-loop system that maintains stable fluid temperature by adjusting heating power in response to actual temperature conditions.
2Reliability
If heating devices are added to control fluid temperature, then temperature stability improves, but device complexity increases
Solution Approach 1:
The patent divides the heating system into two independent heating devices: one for the supply pipe and another for the discharge pipe. Each heating device is controlled separately with its own temperature sensor, allowing independent optimization of each section without increasing overall system complexity excessively.
Solution Approach 2:
The patent introduces temperature sensors as intermediary elements that mediate between the heating devices and the processing fluid. These sensors provide temperature information to the control system, which then adjusts heating power accordingly, creating an automated control mechanism that reduces the need for complex manual control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces temperature fluctuations of the processing fluid, allowing for precise control and maintaining the fluid in a supercritical state, thereby enhancing the drying efficiency and uniformity of substrates.
Implementation Method 1
a first fluid heating device configured to heat a first pipe that supplies the processing fluid to an interior of the processing container
Implementation Method 2
a second fluid heating device configured to heat a second pipe that discharges the processing fluid from the interior of the processing container
Implementation Method 3
maintaining the fluid in a supercritical state, thereby enhancing the drying efficiency
Data Source
AI summary
A substrate processing apparatus that dries a liquid adhering to a substrate by using a processing fluid in a supercritical state, includes: a processing container in which the substrate is accommodated; a plurality of pipes configured to allow the processing fluid to flow to and from the processing container therethrough; a first fluid heating device configured to heat a first pipe that supplies the processing fluid to an interior of the processing container among the plurality of pipes; and a second fluid heating device configured to heat a second pipe that discharges the processing fluid from the interior of the processing container among the plurality of pipes.