Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently controlling temperature transitions, particularly during the return to room temperature, which can lead to issues like dew condensation and inefficient process continuity due to temperature drift between different control points.
Innovation Solution
A substrate processing apparatus with a control device that optimizes temperature control by using a refrigerator to heat or cool the mounting table based on temperature readings from multiple control points, employing on-off control to maintain the temperature within specified limits, thereby reducing temperature drift and ensuring timely return to room temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the refrigerator continuously heats the mounting table to return it to room temperature, then the temperature recovery speed is improved, but temperature overshoot and dew condensation occur due to excessive heating
Solution Approach 1:
The patent implements periodic on-off control of the refrigerator based on temperature thresholds. When the temperature difference between the first control point (near refrigerator) and second control point (on mounting table) exceeds a predetermined threshold, the refrigerator is turned on; when the difference falls below the threshold, it is turned off. This periodic action prevents continuous heating while maintaining efficient temperature recovery.
Solution Approach 2:
The system uses temperature feedback from two control points to regulate refrigerator operation. The control device continuously monitors the temperature difference between the first control point (near the refrigerator) and the second control point (on the mounting table), and adjusts the refrigerator's heating state accordingly. This feedback mechanism prevents temperature overshoot and dew condensation by stopping heating before the mounting table reaches room temperature.
2Productivity
If the refrigerator operates without on-off control to ensure rapid heating, then the productivity is improved, but energy waste occurs due to excessive heating beyond required temperature
Solution Approach 1:
The refrigerator operates periodically based on temperature threshold feedback rather than continuously. This allows the system to maintain high productivity by rapidly recovering temperature when needed while avoiding energy waste by turning off the refrigerator once the temperature difference falls below the threshold, preventing excessive heating.
Solution Approach 2:
The system uses the temperature difference between the two control points as a self-regulating indicator. When the mounting table approaches room temperature, the temperature difference naturally decreases, automatically triggering the refrigerator to turn off without requiring external intervention, thus preventing energy waste.
3Device complexity
If temperature control is based on a single control point, then the device complexity is reduced, but temperature drift between different locations cannot be detected
Solution Approach 1:
The patent divides the temperature monitoring function into two separate control points: the first control point near the refrigerator and the second control point on the mounting table. This segmentation allows independent measurement of temperatures at different locations, enabling detection of temperature drift and differential heating effects that would be invisible with a single control point.
Solution Approach 2:
The temperature difference between the two control points serves as an intermediary parameter for control decisions. Rather than directly controlling based on absolute temperature at one location, the system uses the temperature difference as a mediator to determine when to activate or deactivate the refrigerator, providing more accurate control of the actual substrate temperature.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively manages temperature transitions, preventing excessive heating and ensuring rapid, controlled return to room temperature, thus minimizing dew condensation and maintaining process integrity.
Implementation Method 1
a heat transfer gas container placed on a back side of the mounting table with a gap between the mounting table and the heat transfer gas container and configured to be cooled by a refrigerator
Data Source
AI summary
A substrate processing apparatus, a method, and a program for controlling temperature of the substrate processing apparatus. A substrate processing apparatus comprising: a mounting table configured to hold a substrate to be processed in a vacuum processing container; a heat transfer gas container placed on a back side of the mounting table with a gap between the mounting table and the heat transfer gas container and configured to be cooled by a refrigerator; and a control device configured to control heating of the refrigerator to the vicinity of a first temperature on the basis of a temperature of a first control point provided near the refrigerator and then switching the heating control for the refrigerator on or off.