Substrate processing device
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Solution Overview
Problem
Conventional substrate processing devices face safety issues due to high temperatures, as heat from the chamber is not effectively shielded, potentially causing burns to operators.
Innovation Solution
A substrate processing device is designed with a chamber, a first insulating plate separated from the outer wall by a distance, and a second insulating plate separated from the first plate, creating two gas insulating layers to minimize heat transfer. The device includes refrigerant suppliers to control temperature and flow rate in these layers, enhancing heat shielding efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the first insulating plate is in close contact with the chamber wall to block heat, then heat shielding is achieved, but heat is directly transmitted to the first insulating plate limiting effective shielding
Solution Approach 1:
The insulation system is divided into multiple insulating plates (first insulating plate 2, second insulating plate 3) with a gas insulating layer between them. This segmentation creates multiple thermal barriers, where each plate and the gas layer between them contribute to heat blocking, preventing direct heat transmission while maintaining effective shielding.
Solution Approach 2:
A gas insulating layer is introduced as an intermediary between the first insulating plate and the second insulating plate. This gas layer acts as a thermal barrier that reduces heat conduction, allowing the insulating plates to block heat effectively without direct contact between plates, thus maintaining shielding effectiveness.
2Object-affected harmful factors
If two insulating plates are used to block heat from the chamber, then heat shielding is improved, but the structure becomes more complex
Solution Approach 1:
The insulation system is divided into multiple insulating plates (first insulating plate 2, second insulating plate 3) with a gas insulating layer between them. This segmentation creates multiple thermal barriers, where each plate and the gas layer between them contribute to heat blocking, preventing direct heat transmission while maintaining effective shielding.
3Object-affected harmful factors
If the first insulating plate is separated from the chamber wall by a distance to create gas insulating layer, then heat transmission is reduced, but the device volume increases
Solution Approach 1:
A gas insulating layer is utilized between the first insulating plate and the second insulating plate to provide thermal insulation. This pneumatic approach uses the low thermal conductivity of gas to reduce heat transmission, achieving effective heat blocking with minimal space requirement compared to solid insulation materials.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces heat loss from the chamber and prevents heat transmission to the outside, thereby minimizing safety risks and improving operational safety.
Implementation Method 1
a gas insulating layer a is defined by the first insulating plate 2, the support 4, and the second insulating plate 3 and is formed between the outer wall of the chamber 1 and an outer space. The gas insulating layer a blocks heat of the chamber 1 from transmitting to the outer space.
Implementation Method 2
the substrate processing device may further include a refrigerant supplier for supplying refrigerant to the second space
Data Source
AI summary
Disclosed is a heat shielding device which shields heat from a chamber wall to the outside by creating one or more gas insulating layers around a chamber heated to a high temperature, thereby reducing heat loss and power consumed when heating the chamber to a certain temperature and reducing safety problems such as burning of an operator.