Substrate Processing Control Device Recipe Visualization
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Solution Overview
Problem
Existing substrate processing technologies struggle to visually display the order of substrate processing and conditioning processes, making it difficult for users to understand and verify the execution sequence, especially when complex parameters and concurrent processing are involved.
Innovation Solution
A device and method for controlling a substrate processing apparatus that generates a system recipe by combining substrate processing and conditioning recipes, and chronologically displays the execution order of these processes for each process module, using a control device with a processor and memory to visualize the sequence before actual processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a system recipe combines multiple substrate processing and conditioning recipes with complex parameters, then the processing capability and functionality are improved, but the understandability and verification of execution order becomes difficult
Solution Approach 1:
The patent creates a visual copy or representation of the execution order through a display interface that shows process modules, substrates, and process sequences. This visual copy allows users to verify the execution order without affecting the actual complex processing operations, resolving the contradiction between maintaining complex processing capability and ensuring understandability.
Solution Approach 2:
The patent introduces an intermediary display system that mediates between the complex system recipe parameters and user understanding. This intermediary layer translates complex processing information into visual representations showing execution order, process modules, and substrate sequences, allowing users to verify correctness without simplifying the underlying complex processing logic.
2Productivity
If multiple conditioning processes are performed with different processing times using concurrent processing, then the productivity is improved, but the difficulty of understanding the execution order increases
Solution Approach 1:
The patent segments the concurrent processing information into distinct visual elements showing individual process modules, substrates, and their respective execution sequences. By dividing the complex concurrent processing into separable visual components, users can track each process independently while understanding their relationships, resolving the contradiction between maintaining high productivity and reducing perceived complexity.
Solution Approach 2:
The patent adds a visual dimension to represent concurrent processing execution order, transforming temporal and logical relationships into spatial visual arrangements. This dimensional transformation allows users to comprehend multiple concurrent processes and their sequences simultaneously, maintaining productivity while reducing the cognitive complexity of understanding execution order.
Data Source
AI summary
A device controls a substrate processing apparatus that includes process modules for processing substrates. The device includes a memory that stores a program, and a processor that executes the program stored in the memory to perform a process. The process includes receiving a substrate processing recipe defining substrate processing and multiple conditioning recipes defining conditioning processes, generating a system recipe indicating an execution procedure of the received substrate processing recipe and the received conditioning recipes, and before controlling the substrate processing apparatus to process the substrates according to the system recipe, chronologically displaying an execution order of the substrate processing and the conditioning processes for each of the process modules based on the system recipe.