Substrate Processing Control System for Module Failure Handling
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Solution Overview
Problem
In substrate processing apparatuses, the throughput is deteriorated when a module becomes disabled, as the operation rate of remaining modules decreases due to altered transportation sequences and standby situations, making it difficult to maintain efficient processing.
Innovation Solution
A substrate processing apparatus with a control system that reroutes substrates to operational modules, prioritizing rapid delivery to available units and adjusting transportation schedules to bypass disabled modules, ensuring continuous processing and minimizing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If substrates are transported according to a fixed transportation schedule through multiple unit blocks, then processing sequence is maintained, but throughput deteriorates when a module is disabled due to standby situations in other unit blocks
Solution Approach 1:
The patent implements dynamic transportation schedule adjustment by the control device. When a module is detected as disabled, the system dynamically modifies the transportation schedule to bypass the disabled module and redirect substrates to operational modules. This dynamic adaptation allows the system to maintain high throughput by eliminating standby situations in other unit blocks, while the control device ensures the new transportation sequence maintains proper processing order.
2Ease of operation
If substrates are alternatively provided to multiple unit blocks in sequence, then load balancing is achieved, but operation rate decreases when a module in one unit block is disabled
Solution Approach 1:
The patent changes the transportation parameters (schedule and routing) based on the operational status of modules. When a module is disabled, the control device modifies the transportation parameters to redirect substrates from the affected unit block to alternative operational unit blocks. This parameter change maintains load balancing across the system while preventing the operation rate decrease that would occur with fixed sequential allocation.
3Device complexity
If a fixed transportation schedule is used across all unit blocks, then coordination is simplified, but flexibility to handle module failures is reduced
Solution Approach 1:
The patent implements a feedback mechanism where the control device continuously monitors the operational status of modules in all unit blocks. When a module is detected as disabled, the control device receives this feedback and automatically adjusts the transportation schedule accordingly. This feedback-based approach maintains relatively simple coordination while providing high adaptability to module failures, as the system only modifies transportation routes when actually needed rather than requiring complex pre-planned alternatives.
Data Source
AI summary
Provided is a substrate processing apparatus in which after a module is disabled, a substrate is provided to a carry-in module capable of placing the wafers most rapidly in the plurality of unit blocks and the substrates are sequentially transported to the module group by the transportation means to be delivered to the carry-out module according to a providing sequence of the substrate to the carry-in module in each of the plurality of unit blocks. In particular, the substrates are extracted from the carry-out module according to a providing sequence of the substrate to the carry-in module and transported to a rear module or a substrate placing part. Thereafter, the substrates are transported to the rear module from the carry-out module or the substrate placing part according to a predetermined sequence in which the substrate is provided to the carry-in module in a normal state.