Substrate processing device
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Solution Overview
Problem
Conventional substrate processing devices face safety issues due to high temperatures, as heat from the chamber is not effectively shielded, potentially causing burns to operators.
Innovation Solution
The substrate processing device employs a configuration with a first and second insulating plate separated by distances, creating gas insulating layers between the chamber and external space, and includes refrigerant suppliers to manage temperature and flow rates, enhancing heat shielding efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the chamber is heated to high temperature for thermal process, then the thermal process can be performed, but safety problems such as burning of operator occur
Solution Approach 1:
The insulating plate is divided into multiple segments (first insulating plate and second insulating plate) separated by a gap. This segmentation creates multiple thermal barriers and air gaps that reduce heat transmission to the outer space while maintaining the high temperature inside the chamber for thermal processing
Solution Approach 2:
The first insulating plate and second insulating plate act as intermediary elements between the heated chamber and the outer space. These plates, along with the gas insulating layer in the gap between them, serve as thermal mediators that block heat transmission while allowing the chamber to maintain high temperature for thermal processes
2Object-affected harmful factors
If two insulating plates are used to block heat, then heat shielding is provided, but heat of the chamber wall is directly transmitted to the first insulating plate when it is in close contact with the wall
Solution Approach 1:
The insulating structure is segmented into multiple plates with gaps between them. The first insulating plate is positioned apart from the chamber wall by a first gap, and the second insulating plate is positioned apart from the first insulating plate by a second gap. This segmentation prevents direct heat transmission from the chamber wall to the first insulating plate by introducing air gaps that act as thermal barriers
Solution Approach 2:
The gas insulating layer is pre-established in the gap between the first and second insulating plates before heat transmission occurs. This prior cushioning of insulating gas prevents direct heat conduction between the plates, reducing heat loss while maintaining effective heat shielding capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively minimizes heat loss from the chamber and prevents heat transmission to the outside, reducing safety risks and improving operational efficiency.
Implementation Method 1
The gas insulating layer a is defined by the first insulating plate 2, the support 4, and the second insulating plate 3 and is formed between the outer wall of the chamber 1 and an outer space. The gas insulating layer a blocks heat of the chamber 1 from transmitting to the outer space.
Implementation Method 2
a first space is between the outer wall of the chamber and the first insulating plate, a second space is between the first insulating plate and the second insulating plate, and the substrate processing device may further include a refrigerant supplier for supplying refrigerant to the second space
Data Source
AI summary
Disclosed is a heat shielding device which shields heat from a chamber wall to the outside by creating one or more gas insulating layers around a chamber heated to a high temperature, thereby reducing heat loss and power consumed when heating the chamber to a certain temperature and reducing safety problems such as burning of an operator.