Substrate Processing Apparatus Drive Chamber Ozone Corrosion
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Solution Overview
Problem
In substrate processing using ultraviolet rays, there is a concern about ozone corrosion of the drive system and particle adhesion to the substrate, particularly when an inert gas atmosphere is used, as existing configurations fail to effectively suppress these issues.
Innovation Solution
A substrate processing apparatus with a housing, mounting table, drive mechanism, ultraviolet irradiation unit, and partition member with slit and exhaust ports is designed to prevent ozone from entering the drive chamber and particles from adhering to the substrate, utilizing a partition member with a slit for movement of the support and exhaust ports to manage the atmosphere effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a partition member with a slit is used to allow movement of the support, then the drive mechanism can operate, but ozone from the processing chamber can corrode the drive mechanism
Solution Approach 1:
A blowing port is introduced as an intermediary element between the processing chamber and drive chamber. This port supplies inert gas to create a protective gas barrier that prevents ozone from the processing chamber from reaching and corroding the drive mechanism through the slit in the partition member.
2Object-affected harmful factors
If exhaust ports are added to prevent ozone corrosion, then drive mechanism protection is improved, but device complexity increases
Solution Approach 1:
The partition member is designed to serve multiple functions: it provides structural separation between chambers, contains the slit for mounting table movement, incorporates exhaust ports for ozone removal, and includes a blowing port for inert gas supply. This multi-functionality reduces the need for separate components and minimizes overall device complexity.
3Reliability
If the drive mechanism is protected from ozone, then reliability is improved, but particles from the drive system may adhere to the substrate
Solution Approach 1:
An inert gas atmosphere acts as an intermediary barrier between the drive chamber and processing chamber. This gas barrier prevents particles generated in the drive chamber from reaching the substrate in the processing chamber, while also protecting the drive mechanism from ozone corrosion.
Solution Approach 2:
The harmful elements (ozone and particles) are extracted from the processing environment through exhaust ports. The exhaust system removes ozone from the processing chamber and particles from the drive chamber, preventing them from causing damage or contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively suppresses ozone corrosion of the drive mechanism and reduces particle adhesion to the substrate, maintaining a clean processing environment by exhaustively managing the atmosphere through strategic port placement and partitioning.
Implementation Method 1
an ultraviolet irradiation unit configured to irradiate the substrate in the processing chamber with ultraviolet rays
Implementation Method 2
incorporation of air is not avoidable even when an inert gas atmosphere is used as a processing atmosphere, and thus ozone is generated
Data Source
AI summary
A substrate processing apparatus includes a housing, a mounting table provided in the housing and configured to mount a substrate thereon, a drive mechanism provided below the mounting table so as to move the mounting table in a front-back direction between a delivering/receiving location for the substrate and a processing chamber, an ultraviolet irradiation unit configured to irradiate the substrate in the processing chamber with ultraviolet rays, a partition member provided to partition the processing chamber and a drive chamber with the drive mechanism positioned therein up and down, the partition member having a slit for allowing movement of a support supporting the mounting table, first exhaust ports formed in the drive chamber to exhaust an atmosphere in the drive chamber, and second exhaust ports formed along a lengthwise direction of the slit so as to face the slit.