Substrate Processing System Illicit Use Prevention
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Solution Overview
Problem
Conventional substrate processing systems lack effective mechanisms to confirm legitimate use and prevent illicit use, especially when transferred to third parties, as control programs are often not restricted, leading to potential misuse and unauthorized upgrades.
Innovation Solution
Incorporating a license information storing device and a confirming device that checks usage terms, such as shutdown times, device information, and network connections, to verify the state of use and prevent unauthorized operation by comparing stored license information with current system data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If control programs are provided free of charge with substrate processing systems, then ease of operation and system functionality are improved, but device security and prevention of illicit use deteriorate
Solution Approach 1:
The patent applies preliminary action by embedding a license checking mechanism that verifies usage terms before the control program executes. The system checks license information (such as shutdown time limits, device information, and network connection details) prior to operation, preventing illicit use before it occurs while still providing free control programs to legitimate users.
2Adaptability or versatility
If substrate processing systems can be transferred to third parties, then adaptability and market flexibility are improved, but device security and control over program usage deteriorate
Solution Approach 1:
The patent implements feedback by continuously monitoring system operation against license terms. The license checking mechanism provides feedback on whether the current usage complies with agreed terms (such as shutdown time limits and device identification), enabling the system to detect and respond to illicit transfers or unauthorized use while allowing legitimate transfers to occur.
3Reliability
If license checking mechanisms are implemented to prevent illicit use, then device security is improved, but device complexity and operational overhead increase
Solution Approach 1:
The patent applies self-service by designing a license checking mechanism where the substrate processing system automatically verifies its own usage compliance without requiring external intervention. The system independently checks license information against current operation parameters, reducing the need for complex external monitoring infrastructure while maintaining security.
Data Source
AI summary
[PROBLEM] To enable confirmation of whether a substrate processing system is being illicitly used and preventing that use when there is the fact of illicit use.[MEANS FOR SOLUTION] A license file LF is a file encrypting license information L including usage terms of a substrate processing system for a specific user. A match confirmation program P2 confirms the match between the content of the license file LF decrypted by a decryption program P1 and device information DI, network information NI, and current time CT obtained from the substrate processing system to confirm the existence of the fact of illicit use. If there is illicit use, the control program P3 stops operation of the substrate processing system until predetermined action is taken based on the information from the match confirmation program P2.