Substrate Processing Liquid Replenishment and Collection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in replenishing the processing liquid supply tank while collecting used processing liquid, especially when the used liquid's temperature is lower than the suitable processing temperature, leading to inefficiencies and increased costs due to the need for multiple heaters and temperature regulators.
Innovation Solution
A substrate processing apparatus with a configuration that includes multiple tanks for processing liquid collection and replenishment, where the used processing liquid is selectively switched between tanks for collection and replenishment, allowing concurrent replenishment of the supply tank with processing liquid from tanks not in use for collection, and utilizing a common heater and temperature regulator to maintain optimal temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the moisture evaporation unit heats the collected processing liquid to replenish the first tank, then the processing liquid temperature is regulated, but the replenishment cannot occur concurrently with the collection process
Solution Approach 1:
The system divides the single tank into two separate tanks (first tank and second tank) and segments the collection and replenishment operations. While the first tank is being replenished, the second tank collects processing liquid, and vice versa. This segmentation allows collection and replenishment to occur simultaneously in different tanks, eliminating the time loss associated with sequential operations.
Solution Approach 2:
The system performs preliminary heating of processing liquid in one tank while simultaneously collecting liquid in the other tank. The heater pre-heats the processing liquid in the first tank during the collection phase, so that when replenishment occurs, the liquid is already at the required temperature, enabling concurrent collection and replenishment operations.
2Reliability
If multiple heaters and temperature regulators are used to maintain processing liquid temperature during concurrent collection and replenishment, then temperature control is achieved, but device complexity and cost increase
Solution Approach 1:
The system merges the heating and temperature regulation functions into a single integrated unit that serves both tanks. Instead of installing separate heaters and temperature regulators in each tank, one heating unit is configured to heat processing liquid in either the first or second tank as needed, reducing the total number of components while maintaining reliable temperature control during concurrent operations.
Solution Approach 2:
The heater and temperature regulator are designed as universal components that can serve multiple functions - heating processing liquid in the first tank during second tank collection, heating in the second tank during first tank collection, and maintaining temperature in either tank during replenishment. This multi-functionality reduces device complexity while ensuring reliable temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous collection and efficient replenishment of processing liquid, reducing costs by eliminating the need for multiple heaters and temperature regulators, while maintaining the processing liquid at suitable temperatures for substrate processing.
Implementation Method 1
a heater that heats the processing liquid passing through the processing liquid circulator
Data Source
AI summary
A processing liquid is supplied from a supply tank to a processing liquid nozzle of a processing unit, and the processing liquid is supplied from the processing liquid nozzle to a substrate. The processing liquid used in the processing unit is collected and selectively supplied to first and second replenishment tanks. In a period in which the used processing liquid is supplied to the first replenishment tank, the supply tank is replenished with the processing liquid in the second replenishment tank, and the processing liquid in the first replenishment tank circulates while being heated by a heater. In a period in which the used processing liquid is supplied to the second replenishment tank, the supply tank is replenished with the processing liquid in the first replenishment tank and the processing liquid in the second replenishment tank circulates while being heated by the heater.