Substrate Processing Apparatus Maintenance Space Segmentation
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Solution Overview
Problem
Conventional substrate processing apparatuses face limitations in maintenance safety and efficiency due to the need for workers to use ladders in narrow spaces, leading to increased maintenance time and space requirements, and difficulties in securing a stable working environment for high-position components.
Innovation Solution
A substrate processing apparatus with a divided maintenance space, featuring an upper support part that separates the space into upper and lower areas, allowing for safe and easy access to high-position components, and an auxiliary utility part that reduces the footprint and facilitates simultaneous maintenance of upper and lower areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a vertical batch type processing module is used to improve productivity, then substrate processing speed is improved, but the installation position of auxiliary components becomes high requiring ladders for maintenance
Solution Approach 1:
The apparatus is divided into an upper processing module and a lower utility module, with the utility module containing gas supply and exhaust components positioned at a lower, more accessible height. This segmentation allows the processing chamber to maintain its vertical batch configuration for high productivity while the utility components are relocated to facilitate easy maintenance without requiring ladders.
2Ease of manufacture
If the utility part is disposed at a high position to support the processing module, then the processing module can be installed, but the maintenance space becomes narrow and unsafe
Solution Approach 1:
The utility module is repositioned from a vertical arrangement where components are stacked high to a horizontal arrangement where the utility module extends outward at a lower level. This dimensional change allows processing modules to be installed while maintaining safe, ladder-free access to gas supply and exhaust components for maintenance.
3Ease of repair
If separate maintenance tools are installed for different heights, then maintenance can be performed, but the apparatus footprint increases
Solution Approach 1:
Multiple utility functions (gas supply, gas exhaust, and other auxiliary systems) are merged into a single integrated utility module positioned at the lower level. This consolidation eliminates the need for separate maintenance tools at different heights, providing comprehensive maintenance capability while minimizing the apparatus footprint.
4Ease of repair
If maintenance is performed separately for upper and lower areas, then each area can be maintained, but maintenance time increases
Solution Approach 1:
The utility module is pre-positioned at a lower, accessible level that provides simultaneous access to both upper processing module components and lower utility components. This preliminary arrangement of components allows maintenance personnel to service both areas during a single maintenance interval, eliminating the need for separate maintenance operations and reducing total maintenance time.
Data Source
AI summary
The present invention disclosed herein relates to a substrate processing apparatus and a substrate processing system having the same, and more particularly, to a substrate processing apparatus capable of simultaneously processing a large amount of substrates and a substrate processing system having the same. The present invention discloses a substrate processing apparatus including a first processing module in which substrate processing is performed on a plurality of substrates, a second processing module disposed adjacent to the first processing module to perform the substrate processing on the plurality of substrates, a first utility part disposed adjacent to a rear surface of the first processing module, a second utility part disposed adjacent to a rear surface of the second processing module, and an upper support part provided between the first utility part and the second utility part to divide the maintenance space into an upper area and a lower area.