Substrate Processing Apparatus Monitor Data Aggregation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate processing systems face challenges in accurately monitoring the conditions of components while minimizing data transmission load, leading to incomplete monitoring due to reduced data transmission frequency.
Innovation Solution
A substrate processing system that aggregates monitor data to generate package data including maximum, average, and minimum values, which are then transmitted to a group management apparatus, allowing for precise condition monitoring without excessive data increase.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the acquisition frequency of monitor data is increased, then the monitoring precision is improved, but the data amount and network load are increased
Solution Approach 1:
The patent extracts only the essential characteristics of the monitor data (maximum, average, minimum values) rather than transmitting the complete raw data. This extraction principle allows the system to maintain monitoring precision while significantly reducing the data amount that needs to be transmitted and stored, directly resolving the contradiction between monitoring granularity and data volume.
Solution Approach 2:
The patent transforms the monitor data from its original form into aggregated statistical parameters (max, avg, min). This parameter transformation maintains the essential information needed for monitoring while reducing data complexity and volume, enabling high-frequency acquisition without proportional increase in data storage requirements.
2Measurement precision
If the acquisition frequency of monitor data is increased, then the monitoring precision is improved, but the processing load is increased
Solution Approach 1:
The patent performs preliminary aggregation of monitor data at the source (substrate processing apparatus) before transmission. By pre-calculating maximum, average, and minimum values locally, the system reduces the processing load on both the substrate processing apparatus and group management apparatus, while still enabling high-frequency monitoring through simplified data handling.
3Loss of energy
If only a part of the monitor data is transmitted, then the network load is reduced, but the monitoring completeness is degraded
Solution Approach 1:
The patent transforms complete monitor data into three key statistical parameters (maximum, average, minimum) that collectively represent the essential characteristics of the monitored process. This parameter transformation maintains monitoring completeness by capturing the full range and central tendency of the data, while significantly reducing network load compared to transmitting raw data.
Solution Approach 2:
The patent extracts the most critical information from the complete monitor data set - specifically the maximum, average, and minimum values. This extraction provides a compact representation that maintains monitoring effectiveness while reducing data transmission requirements, resolving the contradiction between network load and information completeness.
Data Source
AI summary
Provided are a substrate processing apparatus, a display method thereof, and a substrate processing system capable of detecting any change in the condition of each component of a substrate processing apparatus. In the substrate processing system including the substrate processing apparatus for processing a substrate and a group management apparatus connected thereto, the substrate processing apparatus is configured to acquire monitor data representing at least the condition of each component of the substrate processing apparatus, aggregate a plurality of the monitor data to generate package data including at least one of a maximum value, an average value, and a minimum value of the monitor data, and transmit the package data to the group management apparatus. The group management apparatus is configured to receive the package data from the substrate processing apparatus and readably store the same therein.