Substrate Processing Apparatus Multi-Batch Defect Display
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Solution Overview
Problem
Existing substrate processing apparatuses face difficulties in displaying and analyzing production information across multiple batches, making it challenging to identify and address defects that occur across multiple batches, which hampers production yield and increases waste.
Innovation Solution
A substrate processing apparatus with a storage unit for accumulating production information, a display part for showing production history, and an operation unit that allows selection and comparison of multiple batches' information, enabling the display of defect-related information across batches on a single screen.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If production information of only one batch is displayed, then the display is simple and clear, but it becomes difficult to grasp production information relating to substrates of plural batches and identify defect causes across batches
Solution Approach 1:
The display system segments production information by batch while maintaining the ability to selectively combine and compare multiple batches. The display unit divides the information presentation into individual batch records that can be independently viewed or collectively analyzed, allowing operators to grasp both detailed single-batch data and comparative multi-batch patterns without overwhelming complexity
Solution Approach 2:
The system adds a temporal dimension to the display by enabling comparison across different batches over time. The display unit presents production information not just as static single-batch data but as a multi-dimensional view that includes batch sequences, allowing operators to identify trends and defect patterns across multiple batches by adding the time/batch dimension to the information presentation
2Productivity
If production information of plural batches is displayed simultaneously, then defect relationships across batches can be grasped, but the information becomes complex and difficult to analyze
Solution Approach 1:
The display unit extracts and highlights only the relevant production information needed for defect analysis when multiple batches are compared. Rather than displaying all possible data simultaneously, the system selectively presents key parameters and production conditions that are most relevant to identifying defect causes, reducing information complexity while maintaining defect identification capability
Solution Approach 2:
The system merges production information from multiple batches into a unified comparative view that maintains clarity. The display unit combines data from different batches while preserving the ability to distinguish individual batch characteristics, allowing operators to analyze defect patterns across batches without losing the ability to trace issues to specific batches when needed
3Measurement precision
If detailed production information is stored and displayed, then defect analysis precision is improved, but the time required to find and analyze defects increases
Solution Approach 1:
The system performs preliminary organization and structuring of production information during the storage phase, preparing data in a format that facilitates rapid retrieval and comparison. The storage unit organizes production information by batch with clear indexing and categorization, so that when defect analysis is needed, the pre-organized data can be quickly accessed and compared across batches without requiring time-consuming data gathering or formatting
Solution Approach 2:
The display unit creates simplified copies or representations of the detailed production information stored in the storage unit. Rather than requiring operators to navigate through all raw stored data, the system generates condensed views and comparative summaries that preserve the essential information needed for defect analysis while reducing the time required to interpret the data
Data Source
AI summary
There is provided a substrate processing apparatus that can easily grasp the relationship of a defect substrate between plural batches.A substrate processing apparatus 10 includes: a display unit 16; a storage unit that accumulates and stores production information of the substrate for each batch, the production information being produced when the substrate is processed; a selection receiving unit that receives the selection of plural batches stored in the storage unit; and a display control unit that controls such that substrate information is displayed on the display part, the substrate information being information relating to a state in which the substrates are held the substrate holding part in the plural batches received by the selection receiving unit.