Substrate Processing Connection Port Flow Arrangement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate processing, residual chemical liquids in the flow space of a substrate processing apparatus can lead to cross-contamination and crystallization, causing particles and contamination issues, which are not effectively addressed by existing designs.
Innovation Solution
The substrate processing apparatus is designed with a connection portion having ports aligned along the flow direction, where the common port is positioned between the drain port and the cleaning liquid supplying port, ensuring effective flow of cleaning liquid to remove residual chemical liquids, preventing contamination and crystallization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the common port is disposed at an opposite side of the cleaning liquid supplying port with respect to the drain port in the flow direction, then the connection portion can be simpler in structure, but the cleaning liquid may not be supplied favorably to the region in the flow space between the common port and the drain port, causing chemical liquid to remain and attach to the inner wall
Solution Approach 1:
The patent inverts the conventional port arrangement by positioning the common port between the drain port and the cleaning liquid supplying port in the flow direction, rather than at the opposite side. This inversion ensures that the cleaning liquid flows through the entire flow space including the region between the common port and drain port, effectively preventing chemical liquid residue while maintaining structural simplicity.
2Reliability
If the cleaning liquid flow rate is increased to force out chemical liquid from the flow space, then the cleaning effectiveness improves, but the chemical liquid may crystallize on the inner wall due to rapid evaporation and flow
Solution Approach 1:
The patent performs preliminary action by arranging the ports in a specific sequence (drain port, then common port, then cleaning liquid supplying port in flow direction) that ensures the cleaning liquid naturally flows through all regions before discharge. This preliminary structural arrangement prevents chemical liquid residue without requiring excessive cleaning liquid flow rate, thereby avoiding crystallization caused by rapid evaporation.
3Productivity
If the chemical liquid is not completely removed from the flow space, then the processing can continue without interruption, but cross-contamination of chemical liquids occurs and particles are generated
Solution Approach 1:
The common port serves as an intermediary element positioned between the drain port and cleaning liquid supplying port in the flow direction. This intermediary structure ensures that cleaning liquid flows through the entire flow space including previously problematic regions, completely removing chemical liquid residues. The design achieves thorough cleaning without interrupting processing continuity, preventing both cross-contamination and particle generation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures satisfactory cleaning of the flow space, preventing chemical liquid residue and contamination, thereby ensuring clean processing conditions for substrates.
Implementation Method 1
a flow space is formed in its interior... a cleaning liquid is supplied to the flow space by opening a cleaning liquid piping... the cleaning liquid supplied from the cleaning liquid piping to the connection portion
Data Source
AI summary
A substrate processing apparatus includes a connection portion connected to the common piping and having a flow space in its interior, a chemical liquid supplying piping connected to the connection portion, a drain piping connected to the connection portion, and a cleaning liquid supplying piping connected to the connection portion, the connection portion has a plurality of ports aligned along a flow direction of the flow space, and a common port, which, among these ports, is connected to one end of the common piping, is disposed, in regard to the flow direction, between a drain port, which, among these ports, is connected to the drain piping, and a cleaning liquid supplying port, which, among these ports, is connected to the cleaning liquid supplying piping.