Substrate Liquid Processing Apparatus Atmospheric Pressure Control
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Solution Overview
Problem
The concentration of processing liquids in substrate liquid processing apparatuses is affected by atmospheric pressure changes, leading to variations in the boiling point and concentration of the liquid, which can result in improper processing if not managed effectively.
Innovation Solution
A substrate liquid processing apparatus and method that includes a controller to detect atmospheric pressure and adjust the diluent supply to maintain a set concentration of the processing liquid, using a diluent with a lower boiling point than the processing liquid, and adjusting processing time accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the processing liquid is heated to a predetermined temperature to adjust concentration, then the concentration becomes the concentration at the boiling point, but atmospheric pressure changes cause concentration variations
Solution Approach 1:
The system uses atmospheric pressure detection to detect changes in environmental conditions, then feeds this information back to the controller which adjusts the heating temperature accordingly. This closed-loop feedback mechanism ensures that the processing liquid reaches the correct concentration despite atmospheric pressure variations.
Solution Approach 2:
The system changes the heating temperature parameter based on detected atmospheric pressure. When atmospheric pressure changes, the controller adjusts the target temperature to compensate, ensuring the processing liquid always reaches the desired concentration at the boiling point regardless of environmental conditions.
2Stability of the object's composition
If the processing liquid concentration is adjusted by heating to boiling point, then the concentration becomes stable at that temperature, but atmospheric pressure changes shift the boiling point and thus the concentration
Solution Approach 1:
The system performs preliminary detection of atmospheric pressure before heating the processing liquid. Based on this pre-detection, the controller calculates and sets the appropriate target temperature in advance, ensuring that when heating occurs, the liquid reaches the correct concentration despite atmospheric pressure conditions.
Solution Approach 2:
The atmospheric pressure detection unit continuously monitors environmental conditions and provides feedback to the controller, which adjusts the heating process in real-time to maintain consistent processing liquid concentration across varying atmospheric pressure conditions.
3Ease of operation
If a fixed concentration is used for processing, then the processing parameters are simple, but atmospheric pressure changes cause improper processing
Solution Approach 1:
The system automatically adjusts processing parameters based on atmospheric pressure detection without requiring manual intervention. The controller self-regulates the heating temperature and processing conditions based on environmental conditions, maintaining high processing quality while keeping the operation simple for the user.
Solution Approach 2:
The system dynamically changes processing parameters (heating temperature, processing time) based on detected atmospheric pressure. This automatic parameter adjustment ensures consistent processing quality while maintaining operational simplicity, as the system handles the complexity of adjustments automatically.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures consistent liquid processing on substrates even with varying atmospheric pressures, preventing excessive evaporation and maintaining the desired concentration of the processing liquid.
Implementation Method 1
the phosphoric acid aqueous solution, formed by diluting phosphoric acid by pure water to a predetermined concentration, is used as the processing liquid. In addition, in the substrate liquid processing apparatus, when the phosphoric acid aqueous solution is prepared to have the predetermined concentration, the phosphoric acid aqueous solution, formed by diluting phosphoric acid by pure water, is boiled by being heated to a predetermined temperature so that the concentration of the phosphoric acid aqueous solution becomes the concentration of the phosphoric acid aqueous solution at the temperature (boiling point).
Implementation Method 2
The controller acquires the concentration of the processing liquid and the atmospheric pressure from the concentration detection unit and the atmospheric pressure detection unit, controls an amount of the diluent supplied from the diluent supply section such that the acquired concentration of the processing liquid becomes a previously set concentration (set concentration), and corrects the set concentration according to the acquired atmospheric pressure.
Implementation Method 3
the phosphoric acid aqueous solution, formed by diluting phosphoric acid by pure water, is boiled by being heated to a predetermined temperature so that the concentration of the phosphoric acid aqueous solution becomes the concentration of the phosphoric acid aqueous solution at the temperature (boiling point).
Data Source
AI summary
Disclosed a substrate liquid processing apparatus including: a liquid processing section configured to process a substrate with a processing liquid; a processing liquid supply section configured to supply the processing liquid; a diluent supply section configured to supply a diluent for diluting the processing liquid; a controller configured to control the diluent supply section; a concentration detection unit configured to detect a concentration of the processing liquid; and an atmospheric pressure detection unit configured to detect an atmospheric pressure. The controller acquires the concentration of the processing liquid from the concentration detection unit and the atmospheric pressure from the atmospheric pressure detection unit, controls an amount of the diluent supplied from the diluent supply section such that the acquired concentration of the processing liquid becomes a previously set concentration (“set concentration”), and corrects the set concentration according to, the acquired atmospheric pressure.