Substrate Processing Apparatus Schedule Control for Timely Initiation
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Solution Overview
Problem
In substrate processing, there is a challenge in starting substrate processing in a timely manner to maintain quality, as existing systems often face delays due to resource allocation and conveyance inefficiencies, leading to potential quality degradation.
Innovation Solution
A substrate processing apparatus connected to an intermediate apparatus, with multiple load ports, direct carry-in entrances, processing units, and a control device that manages schedules to ensure timely processing by optimizing conveyance and processing steps, allowing simultaneous execution of steps and adjusting schedules to meet processing-start time limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrates are conveyed through the intermediate receiving/delivering portion between film formation and cleaning, then substrate processing can be performed in sequence, but the processing start time may exceed the time limit and substrate quality deteriorates
Solution Approach 1:
The cleaning device performs preliminary actions by having the carry-in/carry-out table ready to receive substrates and pre-positioning cleaning resources before substrates arrive from the intermediate receiving/delivering portion. This allows the cleaning process to start immediately when substrates are conveyed, reducing delays and ensuring processing starts within the time limit to maintain substrate quality.
2Productivity
If the cleaning device processes substrates carried out from the cassette, then the cleaning function is utilized, but additional substrates from the intermediate receiving/delivering portion cannot be processed timely
Solution Approach 1:
The cleaning device is designed with multi-functionality to handle different substrate sources. The carry-in/carry-out table can receive substrates from both the cassette and the intermediate receiving/delivering portion, and the cleaning resources can process substrates from either source without conflict. This universal design allows the cleaning device to maintain high productivity while processing substrates from multiple sources within the required time limits.
Data Source
AI summary
A second control device of a second substrate processing apparatus determines whether the processing-start expected time for a substrate is equal to or earlier than a processing-start time limit. If the processing-start expected time is equal to or earlier than the processing-start time limit, the second control device allows the second substrate processing apparatus to execute a first schedule and a second schedule that are initial schedules. On the other hand, if the processing-start expected time is later than the processing-start time limit, the second control device changes the initial first schedule and the initial second schedule so that the processing-start expected time becomes equal to or earlier than the processing-start time limit, and the second control device allows the second substrate processing apparatus to execute the first schedule and the second schedule that have been changed.