Substrate Processing Apparatus Segmentation for Continuous Operation
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Solution Overview
Problem
Existing liquid processing apparatuses face inefficiencies and downtime due to troubles in substrate transfer devices or processing liquid supply systems, especially when multiple processing blocks are used, leading to opportunities for improved throughput and continuous operation.
Innovation Solution
A substrate processing apparatus with multiple processing blocks and fluid supply systems, where a control unit can reroute substrates and processing units to maintain operation even if one substrate conveying device or processing fluid supply system encounters issues, ensuring continuous processing by utilizing unaffected units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple processing blocks are provided to increase parallel processing capacity, then substrate processing throughput is improved, but the complexity of the apparatus increases and downtime occurs when any component fails
Solution Approach 1:
The apparatus is divided into multiple independent processing blocks (first processing block and second processing block), each capable of independent operation. When a failure occurs in one block, the other block can continue processing substrates, thereby maintaining productivity while managing system complexity through modular design.
Solution Approach 2:
The control unit dynamically changes the operational parameters of the processing blocks based on system status. When a substrate conveying device or processing fluid supply system fails in one block, the control unit adjusts the operation to utilize only the functional blocks, optimizing throughput under constrained conditions.
2Device complexity
If a common substrate transfer device is used for multiple processing blocks, then device complexity is reduced, but the entire apparatus must stop when the transfer device encounters trouble
Solution Approach 1:
The substrate transfer functionality is segmented into separate conveying devices for each processing block (first substrate conveying device and second substrate conveying device). This allows independent operation of each block's transfer system, so when one conveying device fails, the other block can continue operating with its own functional conveying device.
Solution Approach 2:
Each processing block is pre-configured with its own substrate conveying device and processing fluid supply system, so that when a failure occurs, the control unit can immediately switch to using only the functional blocks without requiring complex real-time reconfiguration or causing apparatus-wide shutdown.
3Device complexity
If processing blocks share common processing fluid supply systems, then device complexity is reduced, but downtime occurs when the fluid supply system encounters issues
Solution Approach 1:
The processing fluid supply systems are segmented into separate first processing fluid supply system and second processing fluid supply system, each dedicated to specific processing blocks. When a failure occurs in one fluid supply system, only the processing blocks dependent on that system are affected, while other blocks with functional fluid supply systems can continue operating.
Solution Approach 2:
Each processing block is pre-associated with specific processing fluid supply systems (first processing block with first and second systems, second processing block with corresponding systems), enabling the control unit to immediately determine which blocks can continue operation when a fluid supply failure occurs, without requiring complex real-time decision-making.
Data Source
AI summary
Provided is a substrate processing apparatus wherein, even if a trouble occurs, it is bound to continue a process for the substrate without stopping the substrate processing apparatus entirely. The substrate processing apparatus according to the present disclosure includes first and second substrate conveying devices configured to convey wafers, and first and second processing blocks provided on the right and left sides of the substrate conveying device and having processing unit arrays each configured to perform the same process. Processing unit arrays on one side and processing unit arrays on the other side are respectively connected to a processing liquid supply system commonly provided with them. And, when any one of substrate conveying devices, processing liquid supply systems has a problem, the process for the wafer can be performed in the processing unit array to which the substrate conveying device and the processing liquid supply system under normal operation belong.