Substrate Processing Apparatus Rotary Table Stage Positioning

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in accurately determining and correcting the positions of rotary tables and stages within processing containers, especially when misalignments occur due to thermal effects or eccentricity.

Innovation Solution

A substrate processing apparatus equipped with a processing container, a rotary table, a stage rotatable relative to the rotary table, an imaging device to capture images of the rotary table and stage, and a controller to process imaging information and control the rotation of the rotary table and stage. The apparatus includes side markers on the rotary table and stage that can be positioned within the imaging device's range, allowing the controller to recognize and correct misalignments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a stage is made rotatable relative to a rotary table to enable substrate processing, then processing versatility is improved, but position determination complexity increases due to the need to determine both rotary table position and stage position

Engineering Contradiction:

Improveprocessing versatilityVSAvoidposition determination complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the position determination task into two independent segments: one for the rotary table and one for the stage. Each component has its own side marker (rotary table side marker and stage side marker) that can be independently detected by the imaging device, allowing separate position determination for each rotating component without increasing overall system complexity

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent introduces side markers as intermediary elements that mediate between the mechanical rotation components and the imaging device. These markers serve as detectable references that enable the controller to determine positions without direct mechanical sensing, simplifying the position determination process while maintaining processing versatility

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If side markers are added to enable position recognition by imaging device, then measurement precision is improved, but device complexity increases due to additional markers and imaging system requirements

Engineering Contradiction:

Improveposition recognition precisionVSAvoidmarker and imaging system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses side markers with distinct visual characteristics (analogous to color changes in TRIZ) that make them easily distinguishable to the imaging device. The markers are designed with specific patterns or contrasts that enable precise detection without requiring complex imaging processing, thus improving measurement precision while keeping the imaging system relatively simple

Inventive Principle:

Principle #32Color changes

Solution Approach 2:

The patent creates simplified visual copies of position information through side markers. Instead of directly measuring the physical positions of the rotary table and stage, the system uses these marker copies as proxies that can be easily captured and processed by the imaging device, reducing the complexity of the imaging system while maintaining precise position recognition

Inventive Principle:

Principle #26Copying

3Manufacturing precision

If position correction is performed to compensate for thermal effects and eccentricity, then manufacturing precision is improved, but loss of time increases due to additional correction operations

Engineering Contradiction:

Improvesubstrate placement precisionVSAvoidcorrection operation time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent performs position determination and correction operations before the actual substrate processing begins. By using the imaging device to capture positions of side markers and calculating correction amounts in advance, the system prepares accurate positioning data beforehand, allowing rapid substrate placement without time-consuming corrections during processing

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent implements a feedback mechanism where the imaging device continuously monitors the positions of side markers on the rotary table and stage, and the controller calculates correction amounts based on any detected misalignments. This feedback loop enables automatic position correction that compensates for thermal effects and eccentricity while minimizing time loss through automated real-time adjustment

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS20250034711A1Substrate processing apparatus and method of disposing substrate

Publication Date: 2025.01.30 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus includes a processing container, a rotary table, a stage, an imaging device, and a controller. The rotary table includes a rotary table side marker capable of being positioned within an imaging range of the imaging device. The stage includes a stage side marker capable of being positioned within the imaging range of the imaging device. The controller recognizes a circumferential position of the rotary table based on the rotary table side marker included in the imaging information, and corrects a position of the rotary table when the rotary table side marker is misaligned. Further, the controller recognizes a circumferential position of the stage based on the stage side marker included in the imaging information, and corrects a position of the stage when the stage side marker is misaligned.