Substrate Processing Liquid Supply Segmentation
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in achieving temperature and processing uniformity due to the gradual temperature decrease of processing liquids as they flow from the central to the peripheral edges of rotating substrates, leading to decreased processing efficiency and increased liquid consumption.
Innovation Solution
A substrate processing apparatus with a processing liquid supplying system that includes a supply flow passage branching into multiple upstream flow passages, multiple discharge ports positioned at varying distances from the rotational axis, and downstream heaters to maintain temperature uniformity and reduce liquid consumption by heating liquids during discharge stoppage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the flow rate of the processing liquid discharged from the nozzle is increased, then the time taken for the processing liquid to reach the upper surface peripheral edge portion of the substrate is reduced, but the consumption amount of the processing liquid increases
Solution Approach 1:
The processing liquid supply system is segmented into multiple discharge ports (main discharge port and multiple auxiliary discharge ports) positioned at different radial distances from the rotational axis. This segmentation allows the liquid to be discharged at multiple locations simultaneously, improving coverage efficiency without requiring increased flow rate, thus avoiding increased consumption.
Solution Approach 2:
Different regions of the substrate receive processing liquid with locally optimized characteristics. The main discharge port supplies liquid to the central region while auxiliary discharge ports supply liquid to peripheral regions at different distances from the rotational axis. This local quality approach ensures uniform temperature distribution across the substrate without increasing overall liquid consumption.
2Area of stationary object
If the processing liquid flows from the central portion to the peripheral edge portion along the upper surface of the substrate, then the entire upper surface is covered, but the temperature of the processing liquid decreases gradually
Solution Approach 1:
The discharge ports are segmented and positioned at multiple radial distances from the rotational axis. This segmentation allows processing liquid to be supplied simultaneously to different regions of the substrate, ensuring that peripheral regions receive freshly discharged warm liquid rather than cooled liquid that has traveled from the center, thereby maintaining temperature uniformity across the entire surface.
Solution Approach 2:
The auxiliary discharge ports are positioned to discharge processing liquid in advance to the peripheral regions before the liquid from the main discharge port would naturally reach those areas. This preliminary action ensures that peripheral regions receive adequately temperatured liquid without waiting for flow from the center, preventing temperature degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances temperature and processing uniformity across the substrate while reducing the consumption of processing liquids by maintaining stable heater temperatures and optimizing liquid distribution, allowing for immediate restart of processing without significant temperature stabilization delays.
Implementation Method 1
The plurality of downstream heaters are respectively connected to the plurality of auxiliary upstream flow passages at positions further upstream than a connection position between the return flow passage and the auxiliary upstream flow passage, and heat the liquids flowing through the plurality of auxiliary upstream flow passages.
Implementation Method 2
a substrate holding unit rotating a substrate around a vertical rotational axis passing through a central portion of the substrate while holding the substrate horizontally
Implementation Method 3
The supply flow passage guides a liquid toward the plurality of upstream flow passages. The plurality of upstream flow passages branch from the supply flow passage and guide the liquid supplied from the supply flow passage toward the plurality of discharge ports.
Data Source
AI summary
A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. A return flow passage is connected to the upstream flow passage. A downstream heater heats liquid flowing through the upstream flow passage. A downstream switching unit supplies the liquid, supplied to the plurality of upstream flow passages from the supply flow passage, to one of the plurality of discharge ports and the return flow passage, selectively.