Automated Transient Response Checking for Substrate Processing Apparatus
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Solution Overview
Problem
Current methods for checking the transient response characteristics of substrate processing apparatuses are inefficient due to the need for manual data extraction and analysis, which leads to human errors and increased man-hours, and are not effective in reflecting the effects of transient data changes.
Innovation Solution
A method that automates the extraction and analysis of process data using a system with a data extracting step and a data analyzing step, where data is divided based on event data indicative of process steps, and analysis conditions are set via a GUI, reducing the need for manual intervention and improving efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual data extraction and analysis is performed, then checking can be carried out, but it causes human errors and increases man-hours
Solution Approach 1:
The system performs automatic data extraction and analysis using pre-stored extracting conditions and analyzing conditions. The analyzing apparatus independently carries out the checking process without requiring manual intervention, thereby eliminating human errors and reducing man-hours while maintaining high reliability
Solution Approach 2:
Extracting conditions and analyzing conditions are stored in advance in the analyzing apparatus. This preliminary preparation allows the system to automatically perform data extraction and analysis when needed, eliminating the need for manual setup and reducing both time and potential human errors
2Measurement precision
If the set value pattern and measured value pattern are directly compared, then transient data changes can be checked, but it puts a heavy load on the PC and takes much time and effort
Solution Approach 1:
The system extracts only the necessary data from the measured value pattern based on pre-stored extracting conditions, rather than comparing entire time-series datasets. This selective extraction reduces the data volume requiring processing while maintaining the ability to detect transient response characteristics
Solution Approach 2:
The system changes the approach from direct comparison of raw time-series data to comparison of extracted and analyzed parameters. By transforming the data into meaningful parameters using pre-stored analyzing conditions, the system reduces computational load while maintaining measurement precision for transient response characteristics
3Productivity
If part of the set value pattern and measured value pattern are compared manually, then man-hour is reduced, but extraction and comparison are manually carried out which causes human errors
Solution Approach 1:
The analyzing apparatus automatically performs data extraction and analysis using pre-stored conditions, eliminating manual operations entirely. This automation maintains high productivity while ensuring reliability by removing human error sources from the extraction and comparison processes
Data Source
AI summary
A substrate processing apparatus checking method that can simply and reliably check the transient response characteristics of a substrate processing apparatus. An analyzing apparatus reads and analyzes process data comprised of time-series data on a plurality of parameters relating to a process comprised of a plurality of steps carried out on a substrate by the substrate processing apparatus. The analyzing apparatus extracts data that satisfies predetermined extracting conditions from the process data, and analyzes the extracted data based on predetermined analyzing conditions.