Substrate Processing Apparatus Utility Data Integration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor manufacturing factories, substrate processing apparatuses face challenges in efficiently monitoring utility data, such as electricity, water, and gas supplies, due to remote locations of utility equipment, leading to increased downtime and operational inefficiencies.
Innovation Solution
A substrate processing apparatus with a display unit and control sections that allow for the display of daily check data on an operation screen, enabling real-time monitoring and flexibility in parameter settings to accommodate different clients and machine types, thereby reducing the need for program changes and improving versatility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If utility equipment is placed under the floor at remote locations, then the substrate processing apparatus can be operated, but the operator must leave the apparatus to check utility data, wasting time and reducing productivity
Solution Approach 1:
The patent combines the utility equipment monitoring function with the substrate processing apparatus control system. The utility equipment data is integrated into the same control panel and display system, allowing operators to monitor both substrate processing status and utility data (electricity, water, gas) from a single location without leaving the apparatus.
Solution Approach 2:
The patent introduces a communication network as an intermediary between the utility equipment and the substrate processing apparatus control system. This network transmits utility data to the control panel, enabling remote monitoring without requiring physical proximity to the utility equipment located under the floor.
2Adaptability or versatility
If the operation screen displays fixed monitor data, then the display program is simple, but it cannot support different clients or machine types requiring different daily check data
Solution Approach 1:
The patent implements a parameter file that stores configurable data items for different clients and machine types. The system reads parameters from this file to dynamically configure which data items are displayed on the operation screen, allowing the same display program to adapt to different requirements by changing parameters rather than modifying the program code.
Solution Approach 2:
The patent creates a universal display system that can handle multiple data types and configurations through a standardized interface. The control panel and display program are designed to work with any data item defined in the parameter file, making the system versatile enough to support different clients and machine types without requiring client-specific programming.
Data Source
AI summary
A substrate processing apparatus including a controller connected to a plurality of sub-controllers for controlling a substrate processing, and an operating section having a display unit for showing an operation screen displaying a daily check data for checking utility equipment relating to each part and having a daily check initial parameter file defined in a client type, a presence of an item and unit conversion. The controller is configured to receive the daily check data from a sub-controller, to convert a unit of the received daily check data, and then to transfer the unit-converted daily check data to the operating section, and the operating section is configured to refer to the daily check initial parameter file and to display the daily check data transferred from the controller on the operation screen.