Substrate Storage Purging Layout for Low-Gas Lithography Handling
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Solution Overview
Problem
Existing substrate storage systems in lithographic apparatuses face inefficiencies in purging substrates, leading to high gas consumption and increased costs, as well as potential degradation of lithographically exposed substrates due to interaction with ambient air during processing delays.
Innovation Solution
A substrate storage system with a dedicated loading position for purging and non-purged storage positions, utilizing a purging system that minimizes gas usage by primarily purging only at the loading position, and maintaining a controlled environment to protect substrates from ambient air.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a purging system is provided to purge substrates in the substrate storage system, then substrates are protected from environmental degradation, but gas consumption increases and purging performance decreases
Solution Approach 1:
The patent applies local quality by providing purging specifically at the loading position where substrates are most vulnerable to contamination during loading/unloading operations, rather than purging the entire substrate storage system uniformly. This localized approach protects substrates where needed while minimizing gas consumption in areas where protection is less critical.
Solution Approach 2:
The substrate storage system is segmented into different zones: a loading position that receives purging and storage positions that are mainly non-purged. This segmentation allows the system to apply purging resources selectively to the loading position while leaving storage positions with minimal or no purging, thereby reducing overall gas consumption while maintaining substrate protection where it matters most.
2Loss of substance
If substrates are stored in a mainly non-purged space, then gas consumption is reduced, but substrates may be exposed to ambient air during storage
Solution Approach 1:
The system performs preliminary purging action at the loading position before substrates are transferred to storage positions. This preliminary protection ensures that substrates are protected from ambient air contamination during the critical loading/unloading phases, while allowing them to be stored in a mainly non-purged environment afterward, thus balancing protection needs with gas consumption reduction.
3Reliability
If purging is performed continuously across all positions, then substrate protection is maximized, but system complexity and cost increase
Solution Approach 1:
The purging system is designed with local quality by concentrating purging resources at the loading position where substrates are handled and most vulnerable to contamination. This localized purging approach simplifies the overall system compared to continuous purging of all storage positions, while still providing adequate substrate protection during critical operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces gas consumption and costs while effectively protecting substrates from environmental degradation, enhancing the efficiency and reliability of lithographic processes.
Implementation Method 1
a purging system to mainly purge the substrate when located in the loading position
Data Source
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AI summary
The invention relates to a substrate storage system comprising an enclosure, a substrate loading port to load a substrate into and/or unload a substrate from a loading position within the enclosure, and a substrate holder to hold a substrate within the enclosure. The substrate holder is configured to move the substrate between the loading position and at least one storage position spaced from the loading position. The substrate storage system further comprises a purging system to mainly purge the substrate when located in the loading position, and wherein the at least one storage position is a mainly non-purged space.