Semiconductor Substrate Rack Ball Member Support
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Solution Overview
Problem
Existing substrate storage racks in semiconductor processing systems face challenges due to complexity and cost associated with machining slots in materials like quartz or PEEK, which also disrupt laminar airflow, necessitating an improved storage solution.
Innovation Solution
A substrate storage rack design featuring a column assembly with a ball member for supporting substrates, where the ball member is compressively seated and fixed between a seating portion and a clamping portion, allowing for efficient substrate positioning without the need for complex machining, and utilizing metallic materials for the column and clamp members to simplify fabrication and maintain airflow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If slots are milled into quartz or PEEK materials for substrate storage racks, then substrate storage functionality is achieved, but manufacturing complexity and cost increase significantly
Solution Approach 1:
The storage rack is divided into separate modular components: a monolithic block providing structural support and separate slot members that can be independently manufactured and then assembled. This segmentation allows each component to be optimized independently - the block can be simple while the slot members provide the necessary substrate support features without requiring complex machining of the main structure.
Solution Approach 2:
The invention combines the structural support function (monolithic block) with the substrate support function (slot members) into an integrated assembly. The slot members are positioned and secured within the block, merging the simplicity of monolithic construction with the functionality of slotted rails, thereby achieving both ease of manufacture and proper substrate storage capability.
2Productivity
If slots are milled into quartz or PEEK materials, then substrate storage is enabled, but machining time and cost increase
Solution Approach 1:
By segmenting the rack into pre-fabricated slot members and a monolithic block, the slot features can be manufactured separately using more efficient processes rather than time-consuming machining of the entire rack. This reduces the time required to produce the storage rack, enabling faster deployment and improving overall system productivity.
Solution Approach 2:
The slot members are prepared in advance as separate components with their slot features already formed, allowing for parallel manufacturing processes. This preliminary preparation of components before final assembly reduces the total manufacturing time and enables more efficient production scheduling, thereby improving productivity.
3Strength
If backing plates are added to support quartz or PEEK slotted rails, then structural support is improved, but laminar airflow is disrupted
Solution Approach 1:
The structural support function is separated from the airflow-sensitive environment by using a monolithic block as the support structure rather than traditional backing plates. The slot members are attached to this block in a manner that provides necessary structural strength while minimizing interference with the laminar airflow patterns required for semiconductor processing.
Solution Approach 2:
The design provides structural support locally at the points where slot members are attached to the monolithic block, rather than using extensive backing plates that would disrupt airflow across the entire region. This localized support approach maintains the necessary mechanical strength while preserving the laminar airflow characteristics in the surrounding areas.
Data Source
AI summary
A substrate storage rack for a semiconductor processing system includes a bottom plate, a top plate, and a column assembly. The top plate is spaced apart from the bottom plate, the column assembly connects the top plate to the bottom plate, and a ball member is compressively seated within the column assembly. The ball member protrudes from the column assembly in a direction toward the top plate to support a substrate within the substrate storage rack and on the ball member. Semiconductor processing systems and methods of making substrate storage racks are also described.