Substrate Recipe Editing With Time-Series Control Value Display
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate processing, editing recipes is inefficient due to difficulties in grasping changes in control values calculated from time-series parameters, leading to decreased work efficiency.
Innovation Solution
A substrate processing apparatus with a calculator to calculate control values for setting items in conformity with edited substrate processing conditions and a controller to display time-series data, improving the understanding and management of these values during recipe editing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If various parameters are set for each step in recipe editing, then the substrate processing condition can be detailed and precise, but it becomes difficult to grasp changes in control values obtained by calculating time-series parameters
Solution Approach 1:
The patent introduces a calculator as an intermediary component that automatically computes control values from the various parameters set in each recipe step. This mediator translates the detailed parameter settings into meaningful control values, allowing operators to maintain precise processing conditions while automatically grasping the resulting control value changes without manual calculation or complex data tracking
Solution Approach 2:
The system implements feedback by displaying the calculated control values back to the operator during recipe editing. This feedback mechanism allows operators to see the impact of their parameter settings in real-time, enabling them to adjust parameters while understanding the resulting control value changes, thus maintaining both precision and visibility
2Manufacturing precision
If detailed parameters are configured for each recipe step, then processing accuracy is improved, but work efficiency during recipe editing decreases
Solution Approach 1:
The calculator operates autonomously to compute control values from the parameters set by the operator. This self-service functionality eliminates the need for operators to manually calculate or track control values, allowing them to focus on setting processing parameters while the system automatically handles the computational aspect, thus improving editing efficiency without sacrificing precision
Solution Approach 2:
The calculator serves as an automated intermediary that bridges parameter setting and control value understanding. By automatically computing and displaying control values, it reduces the cognitive load and time required for recipe editing while maintaining detailed processing accuracy, thereby resolving the efficiency-precision trade-off
Data Source
AI summary
There is provided a technique that includes: a substrate processor configured to process a substrate according to a recipe including at least one step defining a substrate processing condition; an operator configured to receive an editing operation for at least one setting item included in the substrate processing condition; a calculator configured to calculate a control value for a setting value of the at least one setting item in conformity with an edited substrate processing condition obtained by the editing operation; and a controller configured to be capable of controlling a displayer to display time-series data of the control value calculated by the calculator together with information about the at least one step.