Substrate Recipe Identifier Reuse for Secure Processing Schedules
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Solution Overview
Problem
Existing substrate processing technologies face challenges in maintaining productivity while preventing information leaks, particularly when deleting recipes without accumulating them.
Innovation Solution
An information processing apparatus connected to a substrate processing apparatus, which includes a memory to store operation data associated with recipe identifiers and a processor with reception, calculation, determination, and control units. This apparatus receives processing instructions, calculates identifiers from recipes, determines if matching identifiers are stored, and controls the substrate processing using stored operation data when a match is found.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If recipes are deleted after processing without accumulation, then information security is improved, but productivity decreases due to loss of reference data
Solution Approach 1:
The patent divides recipe data into two separate components: identifiers (hash values) that are deleted after processing, and operation data items (reference information) that are retained. This segmentation allows the system to delete sensitive recipe information while preserving useful reference data for future productivity optimization.
Solution Approach 2:
The patent creates a simplified copy of the recipe data in the form of operation data items that contain only the essential reference information needed for productivity improvement, without including the full sensitive recipe details. This copy is stored for future use while the original recipe is deleted.
2Productivity
If operation data is stored for future reference, then productivity is improved, but information security risk increases
Solution Approach 1:
The patent extracts only the necessary reference information (operation data items) from the complete recipe data, separating essential operational parameters from sensitive proprietary information. This extraction allows productivity improvement through data retention while minimizing information security risks by removing unnecessary sensitive content.
Solution Approach 2:
The patent transforms the recipe data by changing its parameters - converting detailed recipe information into simplified operation data items with reduced information content. This parameter change maintains the functional utility for productivity while reducing the security risk by altering the data structure to exclude sensitive elements.
3Reliability
If complete recipe information is accumulated, then reference accuracy is improved, but information leak risk increases
Solution Approach 1:
The patent segments recipe information into identifiers for deletion and operation data items for retention, ensuring that only the portion of data necessary for reference accuracy is preserved while sensitive information is discarded.
Solution Approach 2:
The patent creates a simplified copy containing only reference-critical operation data items, maintaining sufficient accuracy for future processing optimization while eliminating sensitive information that could pose security risks.
Data Source
AI summary
A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processing apparatus using an operation data item associated with the identical identifier and the recipe received by the receiving unit when the determination unit determines that the identical identifier is stored in the memory.