Substrate Processing Recipe Generation for Error-Free Parameter Setup
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Solution Overview
Problem
The current parameter design process for substrate processing devices is burdensome for operators due to the need for careful manual entry of parameter values, which can lead to typing errors and inefficiencies, even when using orthogonal arrays.
Innovation Solution
A parameter design assistance device and method that utilizes statistical techniques, such as the Taguchi method, to generate combination information and create evaluation recipes, reducing operator burden by automating the process of setting parameter values and optimizing substrate processing conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual entry of parameter values via on-screen dialog is used, then operator control and flexibility are maintained, but operator burden increases and typing errors occur
Solution Approach 1:
The system performs parameter design automatically without requiring operator intervention for data entry. The controller autonomously generates combination information from control factors and creates evaluation recipes by matching parameters with level values, enabling the system to serve itself rather than requiring continuous operator input.
Solution Approach 2:
The manual mechanical process of operator data entry is replaced with an automated information processing system. The controller uses statistical techniques to generate combination information and automatically creates evaluation recipes, substituting human manual operations with computational processes that eliminate typing errors.
2Ease of operation
If automated parameter design is implemented, then operator burden is reduced, but system complexity increases
Solution Approach 1:
The controller acts as an intermediary between the operator's simple input (control factors and level values) and the complex task of parameter design. It uses statistical techniques as a mediator to generate combination information and automatically create evaluation recipes, bridging the gap between simple operator input and complex parameter optimization without requiring the operator to understand the complexity.
3Productivity
If orthogonal array is used to reduce experiments, then number of trials is reduced, but manual configuration burden remains
Solution Approach 1:
The system performs preliminary actions by pre-defining control factors and their level values before the actual parameter design process. The controller uses these pre-defined elements to automatically generate combination information and create evaluation recipes, eliminating the need for manual configuration during the experiment setup phase.
Data Source
AI summary
A parameter design assistance device (2) includes storage (24) and a controller (25). The storage (24) stores therein a recipe for controlling a substrate processing device (81). The controller (25) acquires one or more level values for each of control factors. The level values indicate conditions according to which the substrate processing device (1) is to process a substrate (11). The controller (25) generates, through statistical technique, combination information representing combinations of the level values acquired. The controller (25) creates an evaluation recipe for each of the combinations of the level values based on the combination information and the recipe stored in the storage (24). When the evaluation recipe includes a parameter corresponding to a control factor, the controller (25) sets a corresponding level value for the control factor as a parameter value of the parameter.