Substrate Recipe Editing With Undo/Redo Range Validation

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Solution Overview

Problem

In substrate processing apparatuses, editing recipes and parameters can be burdensome due to the need to ensure consistency of setting values within appropriate ranges, often leading to inefficiencies and inconsistencies when changes are made, especially when multiple changes are reverted or restored.

Innovation Solution

A system with a display, operation controller, and controller that includes memory for storing operation history and a determinator to check if setting values are within effective ranges during undo or redo operations, ensuring consistency and reducing re-editing time by recalculating input ranges and performing range checks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual editing of recipe and parameters is performed, then flexibility in modifying substrate processing conditions is improved, but the burden on the editor increases and work efficiency decreases

Engineering Contradiction:

Improveflexibility in modifying substrate processing conditionsVSAvoidburden on editor

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The system automatically performs range checks and consistency validations on setting values during undo/redo operations without requiring manual intervention. The controller autonomously detects inconsistencies between setting values and their effective ranges, and notifies the editor only when necessary, thereby reducing the editorial burden while maintaining flexibility.

Inventive Principle:

Principle #25Self-service

2Adaptability or versatility

If setting values are changed multiple times and then reverted using undo operations, then editing flexibility is improved, but consistency of setting values may be compromised

Engineering Contradiction:

Improveediting flexibilityVSAvoidconsistency of setting values

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The system implements a feedback mechanism where the determinator continuously monitors setting values during undo/redo operations and compares them against stored effective ranges. When an inconsistency is detected, the system notifies the editor, providing immediate feedback that prevents inconsistent states from being finalized, thus maintaining reliability while allowing flexible editing.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system performs preliminary range checks on setting values before they are committed during undo/redo operations. By validating setting values in advance against their effective ranges and related parameters, the system prevents inconsistent states from occurring, ensuring reliability while maintaining editing flexibility.

Inventive Principle:

Principle #10Preliminary action

3Reliability

If setting values are manually restored to original values, then consistency is improved, but work efficiency decreases due to additional time required

Engineering Contradiction:

Improveconsistency of setting valuesVSAvoidwork efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The system automatically performs consistency checks and identifies inconsistent setting values during undo/redo operations without requiring manual restoration. The controller autonomously compares setting values against effective ranges and notifies the editor of specific inconsistencies, eliminating the need for time-consuming manual restoration while maintaining consistency.

Inventive Principle:

Principle #25Self-service

4Adaptability or versatility

If setting values exceed effective ranges, then editing freedom is improved, but system reliability deteriorates due to inconsistent settings

Engineering Contradiction:

Improveediting freedomVSAvoidsystem reliability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The system performs preliminary validation of setting values against their effective ranges before they are committed to the recipe or parameters. The determinator checks each setting value during editing operations and prevents commitment of out-of-range values, ensuring system reliability while allowing editors freedom to explore different parameter combinations within valid ranges.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20240096665A1Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Publication Date: 2024.03.21 KOKUSAI DENKI KK

AI summary

According to the present disclosure, there is provided a technique capable of efficiently editing the file of the setting values while ensuring their consistency before and after change. There is provided a technique that includes: a display for a file describing processing conditions containing setting values; an operation controller for editing the file and undoing or redoing a setting value set in the editing; a controller for controlling an editing for the setting value and including: a memory storing the file and operation history information on the undo operation or the redo operation; and a determinator configured to determine whether or not the setting value is within an effective range when the setting value is reset during the undo operation or the redo operation; and a process vessel in which a substrate is processed based on the file stored in the memory.