Substrate Processing Recipe Correction for Reproducibility Matching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face challenges in evaluating and matching production quality across multiple units without dedicated measuring devices, leading to inconsistencies in reproducibility and manufacturing yield.
Innovation Solution
A substrate processing apparatus equipped with a process chamber, memory for storing recipe information and process data, a monitor for data collection, an analyzer for calculating variation quality data and reproduction index, and a controller for correcting setting information based on the index, enabling self-evaluation and quality matching without additional devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If dedicated measuring devices are used to evaluate production quality, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The substrate processing apparatus integrates multiple functions including processing, monitoring, analysis, and quality evaluation into a single system. The apparatus can both process substrates and evaluate its own production quality using built-in monitoring and analysis capabilities, eliminating the need for separate dedicated measuring devices while maintaining comprehensive quality assessment functionality
Solution Approach 2:
The substrate processing apparatus performs self-evaluation of its production quality by monitoring its own process data, calculating variation quality data, and comparing it with reference values. The system automatically identifies abnormalities and determines correction values without requiring external dedicated measuring devices, enabling the apparatus to serve itself in quality evaluation
2Productivity
If production quality evaluation is performed across multiple substrate processing apparatus, then manufacturing yield is improved, but information sharing and reproducibility matching become more complex
Solution Approach 1:
The system evaluates production quality by analyzing changes in process parameters and calculating variation quality data from process data. By monitoring parameter variations and comparing them with reference values, the system can assess production quality and identify deviations across multiple apparatus without requiring complex information sharing infrastructure
Solution Approach 2:
The substrate processing apparatus implements a feedback mechanism where process data is monitored, variation quality data is calculated, and results are compared with reference values. When deviations are detected, the system determines correction values and applies them to adjust process settings, creating a closed-loop feedback system that continuously improves production quality and enables effective coordination across multiple apparatus
Data Source
AI summary
According to one aspect of the technique, there is provided a technique, including: a process chamber in which a substrate is processed; a memory that stores recipe information describing a procedure that executes the processing of the substrate, process data accumulated during the processing of a plurality of substrates, variation quality data calculated from the process data, and comparison data to be compared with the variation quality data; a monitor configured to monitor the process data; an analyzer configured to compare the variation quality data with the comparison data to obtain a reproduction index indicating a reproducibility of the comparison data, and calculate a correction value of setting information included in the recipe information when the reproduction index is smaller than a predetermined value; and a controller configured to be capable of correcting the setting information included in the recipe information with the correction value.