Substrate Processing Recipe Prediction for Target Shape Matching
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Solution Overview
Problem
Creating a recipe for substrate processing that accurately matches a target shape is time-consuming and difficult to evaluate, requiring multiple iterations of adjusting processing conditions and performing actual processing.
Innovation Solution
A recipe proposal device and method that includes an input section for target shape information, a recipe proposal section to generate a process recipe, a calculation section for predicting the processed shape, and a display section to show target and prediction information, allowing for easy evaluation and modification of the proposed recipe.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a recipe is created by repeating the adjustment of processing conditions and actual processing, then the recipe can be optimized for the target shape, but the time and man-hours required increase significantly
Solution Approach 1:
The system performs preliminary calculations and predictions of the processed shape based on the recipe before actual substrate processing. By using a calculation section that predicts the outcome and a display section that shows the predicted shape, the system allows recipe optimization without requiring multiple actual processing iterations, thus reducing time and man-hours while maintaining recipe accuracy.
Solution Approach 2:
The system creates a virtual model or copy of the substrate processing outcome through calculation and display of the predicted shape. This virtual copy allows evaluation and optimization of the recipe without repeatedly performing actual processing, enabling precise recipe development while minimizing physical substrate consumption and time investment.
2Manufacturing precision
If multiple actual processing iterations are performed to optimize the recipe, then the recipe suitability for the target shape improves, but the evaluation difficulty increases
Solution Approach 1:
The system provides immediate feedback by displaying the predicted shape calculated from the recipe parameters. This feedback mechanism allows users to evaluate recipe appropriateness directly by comparing the predicted shape with the target shape, eliminating the difficulty of evaluation that would otherwise require multiple actual processing iterations and complex measurement procedures.
Solution Approach 2:
The system replaces the mechanical trial-and-error process of actual substrate processing with a computational prediction system. The calculation section computes the expected processed shape based on recipe parameters, and the display section presents this information for evaluation, substituting physical processing and measurement with information-based evaluation that is both faster and easier to assess.
Data Source
AI summary
Disclosed is a recipe proposal device 10 including: an input section 11 for inputting a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus; a recipe proposal section 12 that proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information; a calculation section 13 that calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe; and a display section 14 that displays the target information and the prediction information.