Substrate Container Retainer Biasing and Door Latch Assist

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional SMIF pods experience substrate retainer 'hang up' issues due to stickiness, leading to interference during substrate removal, and excessive biasing forces can cause actuation linkage dismemberment, compromising the integrity of the system.

Innovation Solution

The introduction of a continuous biasing mechanism for the actuation linkage to ensure reliable disengagement of the substrate retainer and additional securing components to withstand increased loads, along with a spring-loaded door latch mechanism to reduce torque requirements for door operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a substrate retainer is rotatably mounted to an actuation linkage relying on gravity for disengagement, then the structure is simple, but the substrate retainer hangs up and does not disengage reliably due to stickiness

Engineering Contradiction:
Improvesubstrate retainer disengagement reliabilityVSAvoidactuation linkage structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the physical state of the actuation linkage from a passive gravity-dependent system to an actively biased system. A biasing member (spring) is introduced to continuously apply a disengagement force to the actuation linkage, changing the operational parameters from gravity-only to gravity-plus-biasing force, thereby ensuring reliable disengagement despite adhesive forces.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The biasing member is pre-loaded to continuously exert a disengagement force on the actuation linkage before the door is even removed. This preliminary action ensures that as soon as the door's holding force is released, the actuation linkage immediately begins moving toward disengagement, overcoming stickiness before it can prevent complete separation.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If a biasing member is added to continuously bias the actuation linkage for reliable disengagement, then disengagement reliability improves, but the actuation linkage experiences increased forces that can cause dismemberment

Engineering Contradiction:
Improvesubstrate retainer disengagement reliabilityVSAvoidactuation linkage structural integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent incorporates securing components (retention clips, retention features) that act as protective measures before failure can occur. These components are designed to engage and hold the actuation linkage together under the increased loads from the biasing member, cushioning against the potential harm of dismemberment during normal operation while still allowing intentional disassembly when needed.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The actuation linkage is divided into separate components (spindle, substrate retainer assembly, biasing member, securing components) that can independently handle specific forces. This segmentation allows each component to be optimized for its specific function and makes the overall system more robust, as failure of one component does not necessarily lead to complete system failure.

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If conventional door latch mechanisms are used, then the structure is simple, but excessive torque is required for door operation

Engineering Contradiction:
Improvedoor operation torque requirementVSAvoiddoor latch mechanism complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

An arcuate spring is introduced as an intermediary element between the door latch mechanism and the door itself. This spring acts as a force mediator that stores energy during door closing and releases it to assist with latching, thereby reducing the torque that must be applied by the motor or actuator to operate the door.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The arcuate spring provides periodic force assistance during the door operation cycle. As the door closes and the spring compresses, it stores energy; as the door reaches the latched position and the spring expands, it releases energy to assist with the latching action. This periodic action reduces the peak torque requirements throughout the operation cycle.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures safe and reliable removal of substrates by preventing hang-ups and maintaining linkage integrity, while significantly reducing torque requirements for door operation, enhancing the overall reliability and efficiency of substrate handling.

Implementation Method 1

A biasing member is operatively coupled to at least one of the frame, the spindle, and the substrate retainer assembly, the biasing member biasing the actuation linkage assembly in the substrate non-retention position

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

An arcuate spring includes a first end and a second end, the first end being pivotally coupled to the latch cam, the second end being pivotally coupled to the latch arm

Methodology Applied
Scientific EffectSpring force: Spring

Implementation Method 3

A wheel and axle are mounted to a lower end of the substrate retainer assembly, the axle being retained to the substrate retainer assembly by a clip-in structure

Methodology Applied
Scientific EffectRolling friction: Roller

Data Source

PatentUS10784135B2Substrate container with improved substrate retainer and door latch assist mechanism
Publication Date: 2020.09.22 ENTEGRIS INC
  • US10784135B2 patent drawing
  • US10784135B2 patent drawing
  • US10784135B2 patent drawing

AI summary

A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might otherwise counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.