Substrate-Handling Robot Imaging for Semiconductor Tool Anomaly Detection
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Solution Overview
Problem
Existing thin-substrate conveyor robots lack the capability to detect anomalies in semiconductor production apparatuses, making it difficult to convey, process, and store substrates effectively.
Innovation Solution
Incorporating an image capturer and a controller in a substrate-holding hand to capture images of components within the semiconductor production apparatus and detect anomalies based on these images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera is used to detect substrates in the storage cassette, then substrate storage state detection is improved, but anomaly detection capability of the semiconductor production apparatus is insufficient
Solution Approach 1:
The image capturer is configured to perform multiple functions: it captures images of both substrates in the storage cassette and components of the semiconductor production apparatus. This multi-functional approach allows a single device to provide both substrate storage state detection and anomaly detection capabilities, resolving the contradiction between specialized substrate detection and general anomaly detection
Solution Approach 2:
The controller acts as an intermediary that processes images captured by the image capturer and determines both substrate storage states and component anomalies. By using the same image capture data for multiple purposes through intelligent processing, the system achieves both precise substrate detection and reliable anomaly detection without requiring separate specialized systems
2Device complexity
If the image capturer is integrated into the substrate-holding hand, then device complexity is reduced, but the ability to capture images of apparatus components may be limited
Solution Approach 1:
The substrate-holding hand with integrated image capturer is designed to move to different positions and orientations during the processing sequence, allowing it to capture images of various apparatus components. The dynamic positioning capability ensures that despite the integrated (simpler) structure, the system maintains versatility in capturing images of different components throughout the substrate processing cycle
Data Source
AI summary
A semiconductor production apparatus system includes a substrate-holding hand; an image capturer for capturing an image of at least a component of a semiconductor production apparatus; and a controller for detecting an anomaly of the component of the semiconductor production apparatus based on the captured image captured by the image capturer.