Substrate Handling Robot Alignment for Arm Deformation Compensation
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Solution Overview
Problem
Existing robots with multiple-gripping facilities for horizontal substrate handling face deformation issues due to the weight of the gripper pack, leading to misalignment and handling challenges, especially in constrained spaces with limited mass-saving requirements.
Innovation Solution
A robot with an alignment facility that connects the carrier block and robot arm using a connecting element with a gap and adjustable screws, allowing for alignment and compensation of deformations to maintain horizontal substrate positioning without overloading the arm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multiple-gripping facility with multiple gripping elements, positioning elements, and spacers is used to enable horizontal substrate handling, then the capability to handle multiple substrates simultaneously is improved, but the weight of the gripper pack increases
Solution Approach 1:
The multiple-gripping facility is divided into modular components: a carrier block that can be attached to the robot arm, multiple gripping elements that can be individually positioned, and spacers that create necessary distances. This segmentation allows the system to handle multiple substrates while maintaining manageable weight distribution and enabling selective use of gripping elements based on application requirements.
2Productivity
If the number of gripping elements, positioning elements, and spacers is increased to handle more substrates, then the substrate handling capacity is improved, but the stiffness of the arm decreases due to increased weight
Solution Approach 1:
The carrier block serves as an intermediary component between the robot arm and the gripping elements. It absorbs and distributes the weight of multiple gripping elements, positioning elements, and spacers, preventing this weight from directly compromising the stiffness and stability of the robot arm. The carrier block acts as a structural mediator that enables high substrate handling capacity while protecting the arm's mechanical integrity.
3Stability of the object's composition
If the arm weight is reduced to maintain stiffness, then the arm stability is improved, but the capability to support multiple gripping elements is worsened
Solution Approach 1:
The system distributes the weight burden from the gripping elements across multiple dimensions: the carrier block provides structural support in the vertical dimension, while the robot arm's multiple degrees of freedom allow it to compensate for the added weight through positional adjustments. This dimensional approach enables the arm to support multiple gripping elements without compromising stability, as the weight is managed through both structural design and active compensation.
4Manufacturing precision
If spacers are used to maintain correct distance between gripping elements, then the substrate positioning accuracy is improved, but the device complexity increases
Solution Approach 1:
The spacers are integrated into the carrier block structure, merging the spacing function with the supporting structure. This integration eliminates the need for separate, adjustable spacing mechanisms and reduces the number of discrete components. The spacers become inherent structural elements of the carrier block, maintaining precise substrate positioning while simplifying the overall device architecture and reducing assembly complexity.
Data Source
AI summary
A robot for handling flat substrates having one or more substrate holder(s), each substrate holder is for horizontally holding respectively one of the substrates, a carrier block holding the substrate holder or if several substrate holders are provided holding the substrate holders spaced from each other, and a robot arm. The carrier block is attached to the robot arm by an alignment facility, and the alignment facility is for aligning the carrier block.