Substrate Transfer Robot Alignment via Rotation Axis Detection
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Solution Overview
Problem
The current method of teaching a substrate transfer robot to align with a substrate placement portion is complex and requires manual operation, as it involves visually confirming the rotation axis of the substrate placement portion, which is inefficient and prone to errors.
Innovation Solution
A method and apparatus that utilize a substrate transfer robot with an object detection sensor and robot arm to detect a target on the substrate placement portion at multiple positions, calculate the index length, and determine the rotation position of the detection line and substrate placement portion, allowing for automatic alignment with the rotation axis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual teaching operation is used to align the substrate transfer robot with the substrate placement portion, then the operator can visually confirm the alignment, but the teaching operation becomes extremely complicated and time-consuming
Solution Approach 1:
The substrate transfer robot automatically detects the rotation axis position of the substrate placement portion using its own object detection sensor, eliminating the need for manual operator intervention. The robot independently performs the alignment task by detecting the target at multiple rotation positions and calculating the rotation axis position, thereby simplifying the teaching operation while maintaining alignment precision.
Solution Approach 2:
The manual visual confirmation and manual teaching operation are replaced by an automated optical detection system. The object detection sensor on the substrate transfer robot detects the target on the substrate placement portion, and the controller automatically calculates the rotation axis position based on detection results, substituting the mechanical manual operation with an automated sensing and calculation system.
2Measurement precision
If manual teaching operation is used to align the substrate transfer robot with the substrate placement portion, then the alignment can be achieved, but the process requires extensive time and operator effort
Solution Approach 1:
The substrate transfer robot autonomously performs the alignment task by detecting the rotation axis position itself, without requiring operator time and effort. The automated detection and calculation process significantly reduces the teaching time while maintaining placement position accuracy.
Solution Approach 2:
The substrate transfer robot performs preliminary detection of the target at multiple rotation positions before final alignment is established. This preliminary action gathers necessary data for calculating the rotation axis position, enabling rapid and accurate alignment without time-consuming manual adjustments.
3Ease of operation
If automatic detection is implemented to simplify the teaching operation, then the operation becomes easier, but precise detection of the rotation axis position is required
Solution Approach 1:
The detection process is segmented into multiple discrete detection positions around the rotation axis. The object detection sensor detects the target at several different rotation positions, and the controller calculates the rotation axis position based on these segmented detection results. This segmentation approach simplifies the operation while achieving precise rotation axis detection through multiple measurement points.
Solution Approach 2:
The controller uses feedback from the object detection sensor to determine the rotation axis position. The detection results from multiple rotation positions are fed back to the controller, which calculates the precise rotation axis position based on this feedback information, enabling automatic alignment with high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and automatic alignment of the substrate transfer robot with the rotation axis of the substrate placement portion, simplifying the teaching process and improving operational efficiency.
Implementation Method 1
a substrate transfer robot provided with a robot reference axis and having an object detection sensor for detecting an object obstructing a detection line
Data Source
AI summary
A target provided to a substrate placement portion is detected by an object detection sensor at a plurality of rotation positions of the substrate placement portion. An index length which is a distance from a robot reference axis to the target in a direction perpendicular to an axial direction, or information correlated therewith, is calculated. At least one of a rotation position of a detection line about the robot reference axis and a rotation position of the substrate placement portion about a rotation axis when the target located on a line connecting the robot reference axis and the rotation axis is detected is calculated on the basis of the calculated index length or the calculated information correlated therewith. A direction in which the rotation axis is present as seen from the robot reference axis is specified on the basis of the calculated rotation position.