Substrate Transport Robot With Per-Substrate Deviation Correction
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Solution Overview
Problem
Existing substrate transport systems face challenges in accurately transporting multiple substrates while minimizing contact with members other than the substrates, which can cause abnormalities such as cracks or deformation, and difficulty in precise positioning.
Innovation Solution
A substrate transport robot system with a substrate holding hand and a controller that detects and corrects the deviation of each substrate relative to a reference position, allowing precise transport operations to ensure accurate placement without unnecessary contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If contact with predetermined contact surface or pin is used to correct substrate position, then substrate positioning accuracy is improved, but substrate abnormalities such as cracks or deformation occur
Solution Approach 1:
The patent replaces the mechanical contact-based positioning method (using contact surfaces or pins that physically touch the substrate) with an optical detection and control system. The detector optically detects substrate position, and the controller calculates deviation amounts to control the robot arm's movement, eliminating the need for mechanical contact and preventing substrate damage.
2Object-affected harmful factors
If contact with members other than substrates is reduced or prevented, then substrate abnormalities are prevented, but substrate transport accuracy deteriorates
Solution Approach 1:
The patent implements a feedback control system where the detector continuously monitors substrate position during transport, the controller calculates the deviation amount based on detection results, and adjusts the robot arm's movement accordingly. This closed-loop feedback mechanism maintains transport accuracy without requiring contact with external members.
Solution Approach 2:
The system uses the substrate itself as the reference for positioning by detecting its actual position during transport. The controller calculates deviation based on the substrate's own position relative to the hand, allowing the substrate to essentially position itself through optical detection rather than external contact.
3Productivity
If multiple substrates are transported together, then productivity is improved, but positioning accuracy for each substrate deteriorates
Solution Approach 1:
The patent applies individualized positioning control to each substrate within the group. The detector detects the position of each substrate separately, and the controller calculates and corrects the deviation for each substrate individually, even though they are transported together on the same hand. This ensures each substrate receives precise positioning attention.
Data Source
AI summary
A substrate transport robot system includes a substrate holding hand to hold a plurality of substrates, a robot arm, and a controller. The controller is configured or programmed to acquire an amount of deviation of placement of each of the plurality of substrates with respect to a predetermined reference position based on a detection result of a detector, and control a transport operation of the robot arm operable to transport the plurality of substrates based on an acquired amount of deviation such that each of the plurality of substrates is loaded separately into a mount and/or unloaded separately from the mount.